Vacuum coating systems

Installation for coating MAP-1 subsequently, this equipment was subjected to repeated modernization, which lead to the creation of modifications MAP2 and MAP-3.

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Description

Specifications

Modern technological processes require modern high-tech solutions. So, in order to create unique materials, in one of the enterprises of the aerospace industry with the participation of leading specialists from a number of domestic enterprises, in 1995 a modern installation for coating MAP-1 was created. Subsequently, this equipment was subjected to repeated modernization, which led to the creation of modifications MAP-2 and MAP-3.

NPO “GKMP” has been a manufacturer of such equipment since 2012. Based on the existing experience in the manufacture of vacuum chambers,vacuum components and covable mechanism , hermetic inlets, pumping systems, we can safely say that at the moment it is possible to manufacture coating systems in vacuum of almost any configuration required by the customer. Own high-tech production, a vacuum laboratory equipped with modern equipment, as well as experience in design developments in this direction allow us to create the required installation in a fairly short time without overstating the cost of the finished equipment.

If necessary, it is possible to create an installation with box loading. This installation ensures the continuous presence of products in a vacuum, and loading and unloading occurs using separately sealed lock boxes. Thus, it is possible to obtain a production line with a continuous process of coating on substrates.

Property	Meaning
Number of chambers in the installation	1
Form of the chamber	cylindrical, rectangular
Dimensions of the working area of the chamber diameter, mm length, mm	300-1500 500-2000
Substrate heating temperature, ^оС	50-400
Material Spraying Method	resistive heating, electron beam heating, ion-plasma magnetron sputtering
Substrate materials	metals, alloys, ceramics, glass, single crystal plates
Coating materials	metals, alloys, nitrides, two-component compounds
The thickness of the coating, microns	0.001-500 (determined by technology)
Possibility of vacuum cleaning by glow discharge	yes
Possibility of sequential sputtering of several coatings in one process	yes
Types of pumping systems used	oil (rotary vane + diffusion pumps), oil-free (dry scroll + turbomolecular pumps)
Types of sensors for monitoring the thickness of the coating	vibrational, quartz, optical (photometric), resistive, capacitive, combined
Substrates location in the chamber	liberally, determined by the process technology
Possibility of carousel processing of substrates	yes
Возможность двустороннего нанесения	yes

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Vacuum coating systems

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