Machines for growing of silicon monocrystals per Czochralski method

This facility is designed to grow silicon monocrystals using the hot melt. Such machines are used to grow silicon monocrystals of “sun” and semiconductor quality 75-300 mm in diameter. Embedded videosystem controls diameter of the monocrystal.
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Description
Specifications

In order to grow a semiconductor silicon monocrystal with specific performances a magnet can be used to suppress convection of the melt.


To improve the growing speed of the crystal we propose a water-cooled pit equipped with electromagnetic drive for lifting and plunging. Water-cooled pit increases the crystal growing speed by 1.5-2 times and improves some key characteristics.


Diameter of the crystal is defined byTV camera. Pyrometers can be mounted to perform temperature control of the heater and/or melt when necessary.


The main pump is represented by a single-module vacuum facility, that includes a Roots pump and a sliding vane rotary pump, including the control unit. To maintain required pressure level inside the operating chamber at constant gas flow, the vacuum facility controls the pumping speed by adjusting rotation frequency. A specific dust filter is mounted in front of the machine for self-cleaning to keep continuous processes (up to 400 hours) uninterrupted without significant losses in pumping speed.


All stages of crystal growing – from leakage check to cooling down of the crystal– are completely automatized.


Currently the Russian semiconductor industry normally uses silicon monocrystals 3,4,6 and 8 inches in diameter. In future 12-inch crystals are expected to be used. The “NPO “GKMP” LLC can manufacture facilities for silicon crystal growing of any diameter.


The machines are customized under approved Technical assignment. Any performances can be changed at your convenience.


Benefits of silicon crystal growing machines per Czochralski method produced by the “NPO “GKMP” LLC

  • Possible use of magnet that suppresses convection of the melt to grow semiconductor monocrystals.
  • Mounted water-cooled pit with electromechanical drive for lifting and plunging. Efficient adsorption of heat is carried out via specific coating of the pit.
  • Fully automatized process including the seed placement .
  • A specific dust filter is mounted in front of the machine for self-cleansing that ensures continuous processes (up to 400 hours) without significant losses in pumping speed.
  • Configuration fit for “sun” and semiconductor silicon.
Property Meaning
Crystal diameter, mm, not to exceed 300
Crystal length, mm, not to exceed 3200
Crucible diameter, inch, not to exceed 32
Crucible capacity, kg, not to exceed 450
Seed travel speed, mm/min, growing 0.1-30
Seed travel speed, mm/min, positioning 600
Seed rotation frequency, rpm, not to exceed 25
Travel and seed rotation frequency tolerance, % ± 0.1
Crucible operating stroke, mm 450
Crucible travel speed, rpm 0.01-50
Crucible rotation speed, rpm, not to exceed 25
Ultimate residual pressure, mmHg (vacuum) 7.5 •10-4
Cooling water flow rate, m3/h, not to exceed 16
Inlet cooling water pressure, MPa, not to exceed 0.2
Argon flow rate, l/min, not to exceed 60
Automated control system Yes
Adaptive crystal diameter control system Yes

Automatic seed placement

Yes

Power supply:

voltage, V

frequency, Hz

3-phase

380/220

50

Maximal power of the main heater, kWA, not to exceed

180

Maximal power of the bottom heater, kWA, not to exceed

90

Diameter * Growth chamber height, mm

1200 * 1490

Diameter * Crystal chamber height, mm

400 * 3600

Mass, kg

Growing module 7500

Dimensions, mm

4400*3950*9500 (10700 while unloading)

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Why choose us?

Affordable prices. The cost is calculated depending on requirements set forth in technical assignment.
Qualified personnel. Our well-trained staff will complete a task of any complexity.
High quality. We use only high-quality raw materials and keep up with the relevant technologies.
Full service cycle. Apart from production itself, we provide additional services, from comissioning to subsequent maintenance.
Wide range of products. Thanks to our long-standingand well-alligned cooperation with numerous companies, we constantly look for new challenges.
One-of-the-kind customized products. We work on approved technical assignment based on relevant standards and regulation.
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