Edwards turbomolecular pumps (England)

Turbomolecular Pumps with rotor-bearing system

Turbomolecular Pumps with rotor-bearing system

Hybrid bearing compound turbo pump Edwards EXT75DX

Hybrid bearing compound turbo pump Edwards EXT75DX

Model

Inlet flange

Pumping speed (N2), l/s

Pumping speed (He), l/s

Pumping speed (H2), l/s

Compression ratio(N2)

Compression ratio(He)

Compression ratio(H2)

Ultimate pressure, Pa (Torr)

EXT75Dx

NW40

42

49

48

>1*1011

1*106

5*104

5×10-6 (3.7×10-8)

ISO63-K

61

57

53

5×10-6 (3.7×10-8)

ISO100-K

66

59

54

5×10-6 (3.7×10-8)

DN63CF

61

57

53

5×10-7 (3.7×10-9)

EXT556H

ISO160-K

540

580

500

>1*1010

1*108

1*106

2×10-7 (1.5×10-9)

DN160CF

1×10-8 (7.5×10-11)

Hybrid bearing compound turbo pump Edwards nEXT300

Hybrid bearing compound turbo pump Edwards nEXT300

Model

Inlet flange

Pumping speed (N2), l/s

Pumping speed (He), l/s

Pumping speed (H2), l/s

Compression ratio (N2)

Compression ratio(He)

Compression ratio(H2)

Ultimate pressure, Pa (Torr)

nEXT240

ISO100-K

240

230

165

>1*1011

3*105

1*104

6×10-6 (4.5×10-8)

DN100CF

5×10-8 (3.7×10-10)

nEXT300

ISO100-K

300

340

280

>1*1011

1*106

5*104

6×10-6 (4.5×10-8)

DN100CF

5×10-8 (3.7×10-10)

nEXT400

ISO160-K

400

390

325

>1*1011

1*108

5*105

1×10-6 (7.5×10-9)

DN160CF

1×10-8 (7.5×10-11)

Shimadzu turbomolecular pumps (Japan)

Turbomolecular Pumps with rotor-bearing system

Turbomolecular Pumps with rotor-bearing system

Turbomolecular pumps with magnetic upper and maintenance-free lower bearing

Turbomolecular pumps with magnetic upper and maintenance-free lower bearing

Hybrid-bearing TMP

PT-150

PT-300

PT-500

Flamges

input

JIS VG 100

JIS VG 100

JIS VG 150

output

NW 25

NW 25

NW 40

Pumping speed, l/s

N2

190

300

550

He

160

260

500

Max. Compressionratio

N2

108

108

108

He

104

104

105

Ultimate pressure, Pa, (torr)

10-8 (7,5*10-11)

10-8 (7,5*10-11)

10-8 (7,5*10-11)

Max pressure, input/output, Pa, (torr)

0,13/13 (9,8*10-4 / 9,8*10-2)

0,13/13 (9,8*10-4 / 9,8*10-2)

0,13/13 (9,8*10-4 / 9,8*10-2)

Rated speed, rpm

72,000

54,000

40,200

Grease, V

F, 10 ml

F, 10 ml

F, 10 ml

Cooling method

air/
water

air/
water

air/
water

Weight, kg

6

10

16

Pfeiffer mechanical-bearing turbopumps

Turbomolecular Pumps with rotor-bearing system

Turbomolecular Pumps with rotor-bearing system

Compact hybrid bearing HiPace turbopumps in the pumping speed class of 10 to 800 l/s - HiPace 700

Compact hybrid bearing HiPace turbopumps in the pumping speed class of 10 to 800 l/s - HiPace 700

Model

HiPace 10

HiPace 60P

HiPace 80

HiPace 300

HiPace 400

HiPace 700

HiPace 800

- Flange (in), ISO-K, ISO-F, CF
- Flange (out), ISO-KF
- Venting connection


DN25
DN16


DN63
DN16
G1/8"


DN63
DN16
G1/8"


DN100
DN16
G1/8"


DN100
DN25
G1/8"


DN160
DN25
G1/8"


DN200
DN25
G1/8"

Pumping speed, l/s
- Nitrogen(N2)
- Helium (Не)
- Hydrogen(Н2)
- Argon (Ar)


10
6
3,7
11,5


64
48
28
63


67
58
48
66


260
255
220
255


355
470
445
320


685
655
555
665


790
700
580
780

Compression ratio:
- Nitrogen (N2)
- Helium (Не)
- Hydrogen (Н2)
- Argon (Ar)


3*106
3*103
3*102
2,5*107


106
3,5*102
2*102
2*106


>1*1011
1,3*107
1,4*105
>1*1011


>1*1011
1*108
9*105
>1*1011


>1*1011
3*107
4*105
>1*1011


>1*1011
3*107
4*105
>1*1011


>1*1011
3*107
4*105
>1*1011

Ultimate pressure, Pa, (torr)

< 10-3 (7,5*10-6)

< 10-6 (7,5*10-9)

< 10-6 (7,5*10-9)

< 10-6 (7,5*10-9)

< 10-6 (7,5*10-9)

< 10-6 (7,5*10-9)

< 10-6 (7,5*10-9)

Max pressure, output, Pa, (torr)

2500 (18,8)

400 (3)

2200 (16,5)

2000 (15)

1100 (8,3)

1100 (8,3)

1100 (8,3)

Rated speed, rpm

90 000

90 000

90 000

60 000

49 200

49 200

49 200

Cooling type

- standart
- optional


convection
air


convection
air


air
air


water
air


water
air


water
air


water
air

Power consumption

24V/28,8 W

24V/110W

24V/110W

24V/300W

48V/420W

48V/420W

48V/420W

Weight, kg

1,8

2,2

2,4

5,8 - 8,7

11,6 - 17,5

11,5 - 17,4

12,8 - 19,1

Compact hybrid bearing HiPace turbopumps in the pumping speed class of 1000 to 2000 l/s - HiPace 2300

Compact hybrid bearing HiPace turbopumps in the pumping speed class of 1000 to 2000 l/s - HiPace 2300

Model

HiPace 1200

HiPace 1500

HiPace 1800

HiPace 2300

- Flange (in), ISO-K, ISO-F, CF
- Flange (out), ISO-KF
- Venting connection


DN200
DN40
G1/8"


DN250
DN40
G1/8"


DN200
DN40
G1/8"


DN250
DN40
G1/8"

Pumping speed, l/s
- Nitrogen (N2)
- Helium (Не)
- Hydrogen (Н2)
- Argon (Ar)

- Tetrafluoromethane (CF4)


1 250
1 300
1 100
1 200
950


1 450
1 350
1 150
1 400
1 100


1 450
1 650
1 700
1 370
1 050


1 900
2 050
1 850
1 850
1 850

Compression ratio:
- Nitrogen (N2)
- Helium (Не)
- Hydrogen (Н2)
- Argon (Ar)

- Tetrafluoromethane (CF4)


>1*108
2*105
6*103
>1*108
>1*108


>1*108
2*105
6*103
>1*108
>1*108


>1*108
3*105
2*104
>1*108
>1*108


>1*108
3*105
2*104
>1*108
>1*108

Ultimate pressure, Pa, (torr)

< 10-6 (7,5*10-9)

< 10-6 (7,5*10-9)

< 10-6 (7,5*10-9)

< 10-6 (7,5*10-9)

Max pressure, output, Pa, (torr)

200 (1,5)

200 (1,5)

180 (1,4)

180 (1,4)

Rated speed, rpm

37 800

37 800

31 500

31 500

Cooling type

water

water

water

water

Power consumption

220V/1,3kW

220V/1,3 kW

220V/1,3 kW

220V/1,3 kW

Weight, kg

27 - 40

29 - 41

33 - 34

34 - 47

Pfeiffer MDP-5011 Turbo Drag High Vacuum Pumps

Pfeiffer MDP-5011 Turbo Drag High Vacuum Pumps

Technical data

MDP 5011

MDP 5011СР
(Chemical Turbo Drag)

Pumpingspeed, l/s

N2

7,5

He

4

H2

3

Compression ratio

N2

1∙109

1∙106

2∙104

250

H2

1∙103

50

Ultimate pressure measured to Pneurop standards with purge

With any type of pump cooling

1∙10-4

Maximum continuous N2inlet pressure, Pа(torr)

Natural convection

10

Forced air cooled

1000

Water cooled

1000

Maximum exhaust pressure, Pa (torr)

With any type of pump cooling

4000 (30)

500 (3,8)

Start-up, min

<1

Rotation speed, rpm

27 000

Exhaust flange

DN16

Controller

ACT100

Pump weight, kg

convection

2,3

Forced air cooled

3

Water cooled

2,5

Controller weight, kg

2

Power supply, V / Hz

220/50

Power consumption, W

75

KYKY turbomolecular pumps with bearings (China)

Turbomolecular Pumps with rotor-bearing system

Turbomolecular Pumps with rotor-bearing system

Turbomolecular pumps with bearings KYKY- FF-160/700E

Turbomolecular pumps with bearings KYKY- FF-160/700E

Technical data

FF-100/110E

FF-160/700E

FF-160/700FE

FF-200/1300E

FF-200/1300FE

FF-250/2000E

Pumping speed, l/s

150

700

700

1300

1300

2000

Compression ratio

N2

108

109

109

109

109

109

H2

5х102

6х106

6х106

6х103

6х103

6х103

Ultimate pressure, no worse Pа (torr)

ISO

4.5х10-7 (3,4*10-9)

6х10-7 (4,5*10-9)

6х10-7 (4,5*10-9)

6х10-6 (4,5*10-8)

6х10-6 (4,5*10-8)

6х10-6 (4,5*10-8)

CF

4.5х10-8 (3,4*10-10)

6х10-8 (4,5*10-10)

6х10-8 (4,5*10-10)

6х10-7 (4,5*10-9)

6х10-7 (4,5*10-9)

-

Inlet flange, mm.

ISO100

ISO160

ISO160

ISO200

ISO200

ISO250

Outlet flange, mm.

KF25

KF40

KF40

KF40

KF40

KF50

Orientation

any

Cooling method

Water-air

water

Water-air

water

Water-air

water

Documents

QMS Certificates and permissions Equipment Patents Product overview Support information
Certificate of conformity.sheet 1
Certificate of conformity.sheet 2
Quality certificate. Road equipment
+7 (4832) 58-19-66
Development — Waydev