Hybrid bearing compound turbo pump Edwards EXT75DX
Model
Inlet flange
Pumping speed (N2), l/s
Pumping speed (He), l/s
Pumping speed (H2), l/s
Compression ratio(N2)
Compression ratio(He)
Compression ratio(H2)
Ultimate pressure, Pa (Torr)
EXT75Dx
NW40
42
49
48
>1*1011
1*106
5*104
5×10-6 (3.7×10-8)
ISO63-K
61
57
53
ISO100-K
66
59
54
DN63CF
5×10-7 (3.7×10-9)
EXT556H
ISO160-K
540
580
500
>1*1010
1*108
2×10-7 (1.5×10-9)
DN160CF
1×10-8 (7.5×10-11)
Hybrid bearing compound turbo pump Edwards nEXT300
Compression ratio (N2)
nEXT240
240
230
165
3*105
1*104
6×10-6 (4.5×10-8)
DN100CF
5×10-8 (3.7×10-10)
nEXT300
300
340
280
nEXT400
400
390
325
5*105
1×10-6 (7.5×10-9)
Turbomolecular pumps with magnetic upper and maintenance-free lower bearing
Hybrid-bearing TMP
PT-150
PT-300
PT-500
Flamges
input
JIS VG 100
JIS VG 150
output
NW 25
NW 40
Pumping speed, l/s
N2
190
550
He
160
260
Max. Compressionratio
108
104
105
Ultimate pressure, Pa, (torr)
10-8 (7,5*10-11)
Max pressure, input/output, Pa, (torr)
0,13/13 (9,8*10-4 / 9,8*10-2)
Rated speed, rpm
72,000
54,000
40,200
Grease, V
F, 10 ml
Cooling method
air/ water
Weight, kg
6
10
16
Compact hybrid bearing HiPace turbopumps in the pumping speed class of 10 to 800 l/s - HiPace 700
HiPace 10
HiPace 60P
HiPace 80
HiPace 300
HiPace 400
HiPace 700
HiPace 800
- Flange (in), ISO-K, ISO-F, CF - Flange (out), ISO-KF - Venting connection
DN25 DN16
DN63 DN16 G1/8"
DN100 DN16 G1/8"
DN100 DN25 G1/8"
DN160 DN25 G1/8"
DN200 DN25 G1/8"
Pumping speed, l/s - Nitrogen(N2) - Helium (Не) - Hydrogen(Н2) - Argon (Ar)
10 6 3,7 11,5
64 48 28 63
67 58 48 66
260 255 220 255
355 470 445 320
685 655 555 665
790 700 580 780
Compression ratio: - Nitrogen (N2) - Helium (Не) - Hydrogen (Н2) - Argon (Ar)
3*106 3*103 3*102 2,5*107
106 3,5*102 2*102 2*106
>1*1011 1,3*107 1,4*105 >1*1011
>1*1011 1*108 9*105 >1*1011
>1*1011 3*107 4*105 >1*1011
< 10-3 (7,5*10-6)
< 10-6 (7,5*10-9)
Max pressure, output, Pa, (torr)
2500 (18,8)
400 (3)
2200 (16,5)
2000 (15)
1100 (8,3)
90 000
60 000
49 200
Cooling type
- standart - optional
convection air
air air
water air
Power consumption
24V/28,8 W
24V/110W
24V/300W
48V/420W
1,8
2,2
2,4
5,8 - 8,7
11,6 - 17,5
11,5 - 17,4
12,8 - 19,1
Compact hybrid bearing HiPace turbopumps in the pumping speed class of 1000 to 2000 l/s - HiPace 2300
HiPace 1200
HiPace 1500
HiPace 1800
HiPace 2300
DN200 DN40 G1/8"
DN250 DN40 G1/8"
Pumping speed, l/s - Nitrogen (N2) - Helium (Не) - Hydrogen (Н2) - Argon (Ar)
- Tetrafluoromethane (CF4)
1 250 1 300 1 100 1 200 950
1 450 1 350 1 150 1 400 1 100
1 450 1 650 1 700 1 370 1 050
1 900 2 050 1 850 1 850 1 850
>1*108 2*105 6*103 >1*108 >1*108
>1*108 3*105 2*104 >1*108 >1*108
200 (1,5)
180 (1,4)
37 800
31 500
water
220V/1,3kW
220V/1,3 kW
27 - 40
29 - 41
33 - 34
34 - 47
Pfeiffer MDP-5011 Turbo Drag High Vacuum Pumps
Technical data
MDP 5011
Pumpingspeed, l/s
7,5
4
H2
3
Compression ratio
1∙109
1∙106
Hе
2∙104
250
1∙103
50
Ultimate pressure measured to Pneurop standards with purge
With any type of pump cooling
1∙10-4
Maximum continuous N2inlet pressure, Pа(torr)
Natural convection
Forced air cooled
1000
Water cooled
Maximum exhaust pressure, Pa (torr)
4000 (30)
500 (3,8)
Start-up, min
<1
Rotation speed, rpm
27 000
Exhaust flange
DN16
Controller
ACT100
Pump weight, kg
convection
2,3
2,5
Controller weight, kg
2
Power supply, V / Hz
220/50
Power consumption, W
75
Turbomolecular pumps with bearings KYKY- FF-160/700E
FF-100/110E
FF-160/700E
FF-160/700FE
FF-200/1300E
FF-200/1300FE
FF-250/2000E
150
700
1300
2000
109
5х102
6х106
6х103
Ultimate pressure, no worse Pа (torr)
ISO
4.5х10-7 (3,4*10-9)
6х10-7 (4,5*10-9)
6х10-6 (4,5*10-8)
CF
4.5х10-8 (3,4*10-10)
6х10-8 (4,5*10-10)
-
Inlet flange, mm.
ISO100
ISO160
ISO200
ISO250
Outlet flange, mm.
KF25
KF40
KF50
Orientation
any
Water-air
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