Edwards STP-iXA4506 series magnetically levitated turbomolecular pump (TMP)
Model
Connection flange, inlet
Pumping speed N2 , l/s
Pumping speed H2, l/s
Pumping speedAr, l/s
CompressionratioN2
CompressionratioH2
Max gas flowN2, sccm
Max gas flowAr, sccm
Allowable backing pressure
STP-iX455
ISO100-K
300
-
>1*108
>1*104
6.5×10-6 (5×10-8)
DN100CF
1×10-8 (7.5×10-11)
ISO160-K
450
460
DN160CF
STP-iXR1606
ISO160-F
900
600
1*103
4700
1800
1×10-7 (7.5×10-10)
VG150
ISO200-F/
ISO250-F
1600
1200
VG200
STP-iXA2206C
2200
1900
1*104
3000
1400
DN250CF
STP-iXA3306C
2650
2300
2*103
4000
2100
ISO320-F
3200
2800
DN320CF
STP-iXA4506C
2700
4300
2600
STP iXA3306C 5-axis Magnetic Bearing Turbo-Molecular Pump
Pumping speed N2, l/s
Pumping speed Ar, l/s
Compressionratio N2
Compressionratio H2
Max gas flow N2, sccm
STP301 / STP301C
>2*104
2500
STPH451 / STPH451C
480
103
STP603 / STP603C
650
550
>1*105
130
STP1003 / STP1003C
ISO200-F
1000
800
DN200CF
STPA803C
520
1500
STPA1303C
1300
STPA1603C
>7*103
STPA2203C
1700
>2,5*104
1×10-6 (7.5×10-9)
STP-XA2703C
2050
>6*103
STP-XA3203C
STP-XA4503C
2150
Turbopumps with hybrid magnetic bearing HiPace M (HiPace 800 M)
HiPace 300 M
HiPace 700 M
HiPace 800 M
- Flange (in), ISO-K, ISO-F, CF - Flange (out), ISO-KF - Venting connection
DN100 DN16 G1/8"
DN160 DN25 G1/8"
DN200 DN25 G1/8"
Pumping speed, l/s - Nitrogen(N2) - Helium(Не) - Hydrogen(Н2) - Argon(Ar)
255 215 170 250
685 600 480 660
790 625 500 775
Compression ratio - Nitrogen (N2) - Helium(Не) - Hydrogen(Н2) - Argon(Ar)
>1*1011 >1*108 5*105 >1*1011
>1*1011 >1*107 2*105 >1*1011
Ultimatepressure, Pa, torr
< 1*10-5 (7.5*10-8)
Maximum output working pressure, Pa (Torr)
2000 (15)
800 (6)
Rotation speed RPM
60 000
49 200
Cooling type
Water cooled
Power consumption
48V/300W
Weight, kg
13.1 - 17.2
15.7 - 20.8
17.1 - 21.5
ATH-M Series hybrid magnetically levitated turbo pumps (ATH2300M)
Technicaldata
ATH 500M
ATH 1300M
ATH 1300MT*
ATH 1603M
ATH 1600MT*
ATH 2303M
ATH 2300MT*
ATH 2800M
ATH 2800MТ*
ATH 3200M
ATH 3200MТ*
RotationspeedRPM
50 000
39 000
31 000
25 000
Flange (in)
DN 100
DN 160
DN 200
DN 250
DN 320
Pumping speedsfor,l/s
N2
340
500
920
1250
1220
1230
1270
1850
Ar
270
1100
1150
1130
1180
1750
2000
2400
He
810
850
960
H2
170
190
490
580
Compression ratio
2*107
107
6*107
>108
8*106
104
8*103
>3*104
2*102
102
3*102
>103
>2*103
<10-6 (7,5 *10-10)
<6*10-7 (4,5 *10-9)
Maximum input working pressure, Pa (Torr)
130 (1)
50 (0,4)
40 (0,3)
2 (1,5 *10-2)
30 (0,2)
14 (0,1)
26 (0,2)
1 (7,5 *10-3)
270 (2)
150 (1,1)
100 (0,8)
200 (1,5)
Max. pumped flow, cm3/ min.
5000
Cooling method
Water
Mountingposition
Inanydesireddirection
Flange (out)
DN40
Run up time, min
<2,5
<5
6
8
10
Turbine weight, kg
17
34
60
85
Controller
Integrated
ACT1300M
Mag- power/ OBC
ACT1300M/ OBC
Mag- power
Controller weight, kg
8,7
Controller power supply
100 to 240V - 50 / 60Hz - single phase
* Heated version (MT) available for corrosive applications. ATH-MT pumps are used for particularly chemically active environments, which have a built-in heating jacket that prevents sedimentation on the inner surface of the pumps.
ATP-M Series magnetically levitated turbopumps designed especially for light gas pumping applications
Pfeiffer Pentaline two-stagevacuum pumps (pumping speed up 22 to 34m3/s)
Technical data
ATP 2300M
Connection flange
DN200, ISO F, CF
DN250, ISO F, CF
Pumpingspeed, l/c
1650
Compressionratio
108
105
7*103
RPM
Pressure min, Pa, torr
10-7 (7,5*10-10)
5 (0,04)
150 (1,13)
Dimensions, mm
Height
290
Diameter
315
52
Standard line of TMP turbomolecular pump with magnetic levitation
TMP-203
TMP-303
TMP-403
TMP-803
TMP-1003
TMP-2003
TMP-3203
water/air-cooled
Ultimatepressure, Pa, (torr)
1,3*10-8 (10-10)
1,3*10-9 (10-11)
Maximum allowable inlet pressure(water/air), Pa (torr)
200/1,3 (1,5/0,01)
400/1,3 (3/0,01)
67/0,4 (0,5/ 0,003)
40/0,4 (0,3/ 0,003)
Maximum allowable outlet pressure (water/air), Pa (torr)
400/40 (3/0,3)
667/40 (5/0,3)
267/40 (2/0,3)
Pumping speed, l/s:
320
420
1080
140
360
930
120
700
790
Compressionratio:
1*109
>1*109
6*104
8*104
7*105
3*105
4*103
1,4*104
Start-up time, min
5 minutes or less
9 minutes or less
13 minutes or less
Bake-out temperature at an inlet flange, оС
<120
InletflangeISO, ConFlat
DU100
DU160
DU200
DU250
DU320
Recommended pumping speed of backing pump in case of gas purge, l/min (m3/h)
>200 (>12)
>500 (>30)
>1500 (>90)
9
14
31
32
55
70
High Pumping speed and turbo molecular pumps
TMP-1103MP
TMP-1103LMP
TMP-1103LMPC
TMP-W2403LMC
FT-3500D
H3153LMC
воздушное
водяное
1,3*10-7 (10-9)
1.3*10-5 (10-7)
Maximum allowable inlet pressure (water/air), Pa (torr)
1,3 (0,01)
6,7 (0,05)
66,7 (0,5)
По Ar: 2,1 (1,6*10-2)
1,33 (10-2)
267 (2)
По Ar: 1330 (10)
3270
2950
Argon
1040
1770
2240
>109
1*1011
5*109
>107
По He: 4*106
106
1*105
1*106
105 (for H2 и He)
12 minutes or less
18 minutes or less
40
Inlet flangeISO, ConFlat
DU 200
DU 250
JIS VG250
JIS VG350
DU 320
72
88
80
Pumps with integrated controller (LM - water cooling, LMC - water cooling, resistance to corrosive attack)
TMP-V1704LM
TMP-V2304LM
TMP-V3304LM (F)
TMP-V3304LMC (F)
10-7 (10-9)
10-6 (10-8)
4,5 (0,03)
7 (0,05)
270 (2,0)
1350
3100
109
Ratedspeed,rpm
33700
27600
менее 9
менее 16
Maximum allowable Argon gas flow rate, sccm
Max. temperature at an inlet flange, оС
< 120
Inlet flange
ISO200B
ISO250B
ISO320B
Outlet flange
KF40
56
94
>1500 (90)
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