Edwards turbopumps

Turbomolecular Pumps with magnetic suspension

Turbomolecular Pumps with magnetic suspension

Edwards STP-iXA4506 series magnetically levitated turbomolecular pump (TMP)

Edwards STP-iXA4506 series magnetically levitated turbomolecular pump (TMP)

Model

Connection flange, inlet

Pumping speed N2 , l/s

Pumping speed H2, l/s

Pumping speedAr, l/s

CompressionratioN2

CompressionratioH2

Max gas flowN2, sccm

Max gas flowAr, sccm

Allowable backing pressure

STP-iX455

ISO100-K

300

300

-

>1*108

>1*104

-

-

6.5×10-6 (5×10-8)

DN100CF

1×10-8 (7.5×10-11)

ISO160-K

450

460

-

>1*108

>1*104

-

-

6.5×10-6 (5×10-8)

DN160CF

1×10-8 (7.5×10-11)

STP-iXR1606

ISO160-F

900

600

-

>1*108

1*103

4700

1800

1×10-7 (7.5×10-10)

VG150

ISO200-F/

ISO250-F

1600

1200

-

>1*108

1*103

4700

1800

1×10-7 (7.5×10-10)

VG200

STP-iXA2206C

ISO250-F

2200

-

1900

>1*108

1*104

3000

1400

1×10-7 (7.5×10-10)

DN250CF

STP-iXA3306C

ISO250-F

2650

-

2300

>1*108

2*103

4000

2100

1×10-7 (7.5×10-10)

DN250CF

ISO320-F

3200

-

2800

>1*108

2*103

4000

2100

1×10-7 (7.5×10-10)

DN320CF

STP-iXA4506C

ISO320-F

4000

2700

-

>1*108

1*103

4300

2600

1×10-7 (7.5×10-10)

STP iXA3306C 5-axis Magnetic Bearing Turbo-Molecular Pump

STP iXA3306C 5-axis Magnetic Bearing Turbo-Molecular Pump

Model

Connection flange, inlet

Pumping speed N2, l/s

Pumping speed H2, l/s

Pumping speed Ar, l/s

Compressionratio N2

Compressionratio H2

Max gas flow N2, sccm

Max gas flowAr, sccm

STP301 / STP301C

ISO100-K

300

300

>1*108

>2*104

2500

-

6.5×10-6 (5×10-8)

DN100CF

1×10-8 (7.5×10-11)

STPH451 / STPH451C

ISO160-F

480

300

>1*108

103

2500

-

6.5×10-6 (5×10-8)

DN160CF

1×10-8 (7.5×10-11)

STP603 / STP603C

ISO160-F

650

550

>1*108

>1*105

130

-

1×10-7 (7.5×10-10)

DN160CF

1×10-8 (7.5×10-11)

STP1003 / STP1003C

ISO200-F

1000

800

>1*108

>1*105

130

-

1×10-7 (7.5×10-10)

DN200CF

1×10-8 (7.5×10-11)

STPA803C

ISO160-F

800

520

>1*108

1*103

1500

-

1×10-7 (7.5×10-10)

DN160CF

STPA1303C

ISO200-F

1300

800

>1*108

1*103

1500

-

1×10-7 (7.5×10-10)

DN200CF

STPA1603C

ISO200-F

1600

1200

>1*108

>7*103

2500

-

1×10-7 (7.5×10-10)

DN200CF

STPA2203C

ISO250-F

2200

1700

>1*108

>2,5*104

1500

-

1×10-6 (7.5×10-9)

DN250CF

STP-XA2703C

ISO250-F

2650

2050

>1*108

>6*103

2300

1900

1×10-7 (7.5×10-10)

DN250CF

STP-XA3203C

ISO320-F

3200

2300

>1*108

>6*103

2300

1900

1×10-7 (7.5×10-10)

DN320CF

STP-XA4503C

ISO320-F

4000

2500

>1*108

>6*103

2800

2150

1×10-7 (7.5×10-10)

Pfeiffer magnetic bearing turbo-molecular pump

Turbomolecular Pumps with magnetic suspension

Turbomolecular Pumps with magnetic suspension

Turbopumps with hybrid magnetic bearing HiPace M (HiPace 800 M)

Turbopumps with hybrid magnetic bearing HiPace M (HiPace 800 M)

Model

HiPace 300 M

HiPace 700 M

HiPace 800 M

- Flange (in), ISO-K, ISO-F, CF
- Flange (out), ISO-KF
- Venting connection


DN100
DN16
G1/8"


DN160
DN25
G1/8"


DN200
DN25
G1/8"

Pumping speed, l/s
- Nitrogen(N2)
- Helium(Не)
- Hydrogen(Н2)
- Argon(Ar)


255
215
170
250


685
600
480
660


790
625
500
775

Compression ratio
- Nitrogen (N2)
- Helium(Не)
- Hydrogen(Н2)
- Argon(Ar)


>1*1011
>1*108
5*105
>1*1011


>1*1011
>1*107
2*105
>1*1011


>1*1011
>1*107
2*105
>1*1011

Ultimatepressure, Pa, torr

< 1*10-5 (7.5*10-8)

< 1*10-5 (7.5*10-8)

< 1*10-5 (7.5*10-8)

Maximum output working pressure, Pa (Torr)

2000 (15)

800 (6)

800 (6)

Rotation speed RPM

60 000

49 200

49 200

Cooling type

Water cooled

Water cooled

Water cooled

Power consumption

48V/300W

48V/300W

48V/300W

Weight, kg

13.1 - 17.2

15.7 - 20.8

17.1 - 21.5

ATH-M Series hybrid magnetically levitated turbo pumps (ATH2300M)

ATH-M Series hybrid magnetically levitated turbo pumps (ATH2300M)

Technicaldata

ATH
500M

ATH
1300M

ATH
1300MT*

ATH
1603M

ATH
1600MT*

ATH
2303M

ATH
2300MT*

ATH
2800M

ATH
2800MТ*

ATH
3200M

ATH
3200MТ*

RotationspeedRPM

50 000

39 000

39 000

31 000

31 000

31 000

31 000

25 000

25 000

25 000

25 000

Flange (in)

DN 
100

DN 
160

DN 
160

DN 
200

DN 
160

DN 
200

DN
200

DN 
250

DN
200

DN
250

DN 
200

DN
250

DN 
200

DN 
200

DN 
250

DN 
250

DN 
320

DN 
320

Pumping speedsfor,l/s

N2

340

500

920

1250

920

1250

1200

1220

1230

1270

1250

1850

1250

1850

2050

2050

2600

2600

Ar

270

500

920

1250

920

1250

1100

1150

1130

1180

1200

1750

1200

1750

2000

2000

2400

2400

He

270

340

810

850

810

850

960

960

960

960

1500

1600

1500

1600

2150

2150

2400

2400

H2

170

190

490

550

490

550

550

550

580

580

1200

1200

1200

1200

1750

1750

1800

1800

Compression ratio

N2

2*107

107

107

6*107

6*107

>108

>108

>108

>108

>108

>108

Ar

8*106

107

107

6*107

6*107

>108

>108

>108

>108

>108

>108

He

104

103

103

8*103

8*103

>3*104

>3*104

>3*104

>3*104

>3*104

>3*104

H2

2*102

102

102

3*102

3*102

>103

>2*103

>2*103

>2*103

>2*103

>2*103

Ultimatepressure, Pa, torr

<10-6 (7,5 *10-10)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

<6*10-7 (4,5 *10-9)

Maximum input working pressure, Pa (Torr)

130 (1)

50 (0,4)

50 (0,4)

40 (0,3)

2 (1,5 *10-2)

30 (0,2)

14 (0,1)

26 (0,2)

1 (7,5 *10-3)

26 (0,2)

1  (7,5 *10-3)

Maximum output working pressure, Pa (Torr)

270 (2)

150 (1,1)

150 (1,1)

150 (1,1)

100 (0,8)

200 (1,5)

150 (1,1)

150 (1,1)

100 (0,8)

150 (1,1)

100 (0,8)

Max. pumped flow, cm3/
min.

2500

3000

3000

4000

1000

4000

1000

5000

1000

5000

1000

Cooling method

Water

Mountingposition

Inanydesireddirection

Flange (out)

DN40

Run up time, min

<2,5

<5

<5

6

6

8

8

10

10

10

10

Turbine weight, kg

17

34

34

34

34

60

60

85

85

85

85

Controller

Integrated

ACT1300M

ACT1300M

Mag- power/
OBC

ACT1300M/
OBC

Mag- power/
OBC

Mag- power/
OBC

Mag- power

Mag- power

Mag- power

Mag- power

Controller weight, kg

8

8

8

8

8,7

8,7

8,7

8,7

8,7

8,7

Controller power supply

100 to 240V - 50 / 60Hz - single phase

* Heated version (MT) available for corrosive applications. ATH-MT pumps are used for particularly chemically active environments, which have a built-in heating jacket that prevents sedimentation on the inner surface of the pumps.

Гибридный турбомолекулярный насос на магнитном подвесе серии ATP-M для откачки легких газов

ATP-M Series magnetically levitated turbopumps designed especially for light gas pumping applications

Pfeiffer Pentaline two-stagevacuum pumps (pumping speed up 22 to 34m3/s)

Technical data

ATP 2300M

Connection flange

DN200, ISO F, CF

DN250, ISO F, CF

Pumpingspeed, l/c

N2

1250

1750

Ar

1200

1650

He

1700

1800

H2

1700

1700

Compressionratio

N2

108

Ar

108

He

105

H2

7*103

RPM

31 000

Pressure min, Pa, torr

10-7 (7,5*10-10)

Maximum input working pressure, Pa (Torr)

5 (0,04)

Maximum output working pressure, Pa (Torr)

150 (1,13)

Dimensions, mm

Height

290

Diameter

315

Weight, kg

52

Turbomolecular pumpwithmagnetic levitation Shimadzu

Turbomolecular Pumps with magnetic suspension

Turbomolecular Pumps with magnetic suspension

Standard line of TMP turbomolecular pump with magnetic levitation

Standard line of TMP turbomolecular pump with magnetic levitation

Model

TMP-203

TMP-303

TMP-403

TMP-803

TMP-1003

TMP-2003

TMP-3203

Cooling method

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

Ultimatepressure, Pa, (torr)

1,3*10-8 (10-10)

1,3*10-8 (10-10)

1,3*10-8 (10-10)

1,3*10-9 (10-11)

1,3*10-9 (10-11)

1,3*10-9 (10-11)

1,3*10-9 (10-11)

Maximum allowable inlet pressure(water/air), Pa (torr)

200/1,3 (1,5/0,01)

200/1,3 (1,5/0,01)

200/1,3 (1,5/0,01)

400/1,3 (3/0,01)

400/1,3 (3/0,01)

67/0,4 (0,5/ 0,003)

40/0,4 (0,3/ 0,003)

Maximum allowable outlet pressure (water/air), Pa (torr)

400/40 (3/0,3)

400/40 (3/0,3)

400/40 (3/0,3)

667/40 (5/0,3)

667/40 (5/0,3)

267/40 (2/0,3)

267/40 (2/0,3)

Pumping speed, l/s:

N2

190

320

420

800

1080

2000

3200

He

140

340

360

800

930

1800

3000

H2

120

320

340

700

790

1600

2400

Compressionratio:

N2

1*109

1*109

1*109

1*109

>1*109

1*109

1*109

He

6*104

8*104

8*104

8*104

8*104

7*105

3*105

H2

4*103

1*104

1*104

4*103

4*103

1,4*104

1*104

Start-up time, min

5 minutes or less

9 minutes or less

13 minutes or less

Mountingposition

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Bake-out temperature at an inlet flange, оС

<120

<120

<120

<120

<120

<120

<120

InletflangeISO, ConFlat

DU100

DU100

DU160

DU160

DU200

DU250

DU320

Recommended pumping speed of backing pump in case of gas purge, l/min (m3/h)

>200 (>12)

>200 (>12)

>200 (>12)

>500 (>30)

>500 (>30)

>500 (>30)

>1500 (>90)

Weight, kg

9

14

14

31

32

55

70

High Pumping speed and turbo molecular pumps

High Pumping speed and turbo molecular pumps

Model

TMP-1103MP

TMP-1103LMP

TMP-1103LMPC

TMP-W2403LMC

FT-3500D

H3153LMC

Cooling method

воздушное

водяное

водяное

водяное

водяное

водяное

Ultimatepressure, Pa, (torr)

1,3*10-9 (10-11)

1,3*10-9 (10-11)

1,3*10-8 (10-10)

1,3*10-7 (10-9)

10-7 (7,5*10-10)

1.3*10-5 (10-7)

Maximum allowable inlet pressure (water/air), Pa (torr)

1,3 (0,01)

6,7 (0,05)

66,7 (0,5)

40 (0,3)

По Ar: 2,1 (1,6*10-2)

1,33 (10-2)

Maximum allowable outlet pressure (water/air), Pa (torr)

267 (2)

800 (6)

800 (6)

267 (2)

По Ar: 1330 (10)

270 (2)

Pumping speed, l/s:

N2

1080

1080

1080

2100

2300

3270

2950

Argon

1040

1040

1040

2000

-

-

-

H2

800

800

800

1770

-

-

3000

He

-

-

-

2240

-

-

3000

Compressionratio:

N2

>109

>109

>109

1*1011

5*109

>107

Argon

107

107

107

По He: 4*106

-

-

H2

106

106

106

1*105

1*106

105 (for H2 и He)

Start-up time, min

5 minutes or less

5 minutes or less

5 minutes or less

12 minutes or less

18 minutes or less

18 minutes or less

Mountingposition

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Bake-out temperature at an inlet flange, оС

<120

<120

<120

<120

40

<120

Inlet flangeISO, ConFlat

DU200

DU 200

DU 200

DU 250

JIS VG250

JIS VG350

DU 320

Weight, kg

32

32

32

72

88

80

Pumps with integrated controller

Pumps with integrated controller (LM - water cooling, LMC - water cooling, resistance to corrosive attack)

Model

TMP-V1704LM

TMP-V2304LM

TMP-V3304LM (F)

TMP-V3304LMC (F)

Cooling method

Water

Ultimatepressure, Pa, (torr)

10-7 (10-9)

10-6 (10-8)

10-7 (10-9)

10-7 (10-9)

Maximum allowable inlet pressure (water/air), Pa (torr)

4,5 (0,03)

7 (0,05)

Maximum allowable outlet pressure (water/air), Pa (torr)

200 (1,5)

270 (2,0)

Pumping speed, l/s:

N2

1400

2100

3200

Argon

1350

2000

3100

Compressionratio:

N2

108

109

He

103

105

H2

102

103

Ratedspeed,rpm

33700

27600

Start-up time, min

менее 9

менее 16

Maximum allowable Argon gas flow rate, sccm

600

1900

Mountingposition

Inanydesireddirection

Max. temperature at an inlet flange, оС

< 120

Inlet flange

ISO200B

ISO250B

ISO320B

Outlet flange

KF40

Weight, kg

60

56

94

Recommended pumping speed of backing pump in case of gas purge, l/min (m3/h)

>1500 (90)

Documents

QMS Certificates and permissions Equipment Patents Product overview Support information
Certificate of conformity.sheet 1
Certificate of conformity.sheet 2
Quality certificate. Road equipment
+7 (4832) 58-19-66
Development — Waydev