Model

Connection flange, inlet

Pumping speed N₂ , l/s

Pumping speed H₂, l/s

Pumping speedAr, l/s

CompressionratioN₂

CompressionratioH₂

Max gas flowN₂, sccm

Max gas flowAr, sccm

Allowable backing pressure

STP-iX455

ISO100-K

300

300

-

>1*10⁸

>1*10⁴

^-

^-

6.5×10^-6 (5×10^-8)

DN100CF

1×10^-8 (7.5×10^-11)

ISO160-K

450

460

-

>1*10⁸

>1*10⁴

^-

^-

6.5×10^-6 (5×10^-8)

DN160CF

1×10^-8 (7.5×10^-11)

STP-iXR1606

ISO160-F

900

600

-

>1*10⁸

1*10³

4700

1800

1×10^-7 (7.5×10^-10)

VG150

ISO200-F/

ISO250-F

1600

1200

-

>1*10⁸

1*10³

4700

1800

1×10^-7 (7.5×10^-10)

VG200

STP-iXA2206C

ISO250-F

2200

-

1900

>1*10⁸

1*10⁴

3000

1400

1×10^-7 (7.5×10^-10)

DN250CF

STP-iXA3306C

ISO250-F

2650

-

2300

>1*10⁸

2*10³

4000

2100

1×10^-7 (7.5×10^-10)

DN250CF

ISO320-F

3200

-

2800

>1*10⁸

2*10³

4000

2100

1×10^-7 (7.5×10^-10)

DN320CF

STP-iXA4506C

ISO320-F

4000

2700

-

>1*10⁸

1*10³

4300

2600

1×10^-7 (7.5×10^-10)

Model

Connection flange, inlet

Pumping speed N₂, l/s

Pumping speed H₂, l/s

Pumping speed Ar, l/s

Compressionratio N₂

Compressionratio H₂

Max gas flow N₂, sccm

Max gas flowAr, sccm

STP301 / STP301C

ISO100-K

300

300

>1*10⁸

>2*10⁴

2500

-

6.5×10^-6 (5×10^-8)

DN100CF

1×10^-8 (7.5×10^-11)

STPH451 / STPH451C

ISO160-F

480

300

>1*10⁸

10³

2500

-

6.5×10^-6 (5×10^-8)

DN160CF

1×10^-8 (7.5×10^-11)

STP603 / STP603C

ISO160-F

650

550

>1*10⁸

>1*10⁵

130

-

1×10^-7 (7.5×10^-10)

DN160CF

1×10^-8 (7.5×10^-11)

STP1003 / STP1003C

ISO200-F

1000

800

>1*10⁸

>1*10⁵

130

-

1×10^-7 (7.5×10^-10)

DN200CF

1×10^-8 (7.5×10^-11)

STPA803C

ISO160-F

800

520

>1*10⁸

1*10³

1500

-

1×10^-7 (7.5×10^-10)

DN160CF

STPA1303C

ISO200-F

1300

800

>1*10⁸

1*10³

1500

-

1×10^-7 (7.5×10^-10)

DN200CF

STPA1603C

ISO200-F

1600

1200

>1*10⁸

>7*10³

2500

-

1×10^-7 (7.5×10^-10)

DN200CF

STPA2203C

ISO250-F

2200

1700

>1*10⁸

>2,5*10⁴

1500

-

1×10^-6 (7.5×10^-9)

DN250CF

STP-XA2703C

ISO250-F

2650

2050

>1*10⁸

>6*10³

2300

1900

1×10^-7 (7.5×10^-10)

DN250CF

STP-XA3203C

ISO320-F

3200

2300

>1*10⁸

>6*10³

2300

1900

1×10^-7 (7.5×10^-10)

DN320CF

STP-XA4503C

ISO320-F

4000

2500

>1*10⁸

>6*10³

2800

2150

1×10^-7 (7.5×10^-10)

Model

HiPace 300 M

HiPace 700 M

HiPace 800 M

- Flange (in), ISO-K, ISO-F, CF
- Flange (out), ISO-KF
- Venting connection

DN100
DN16
G1/8"

DN160
DN25
G1/8"

DN200
DN25
G1/8"

Pumping speed, l/s
- Nitrogen(N₂)
- Helium(Не)
- Hydrogen(Н₂)
- Argon(Ar)

255
215
170
250

685
600
480
660

790
625
500
775

Compression ratio
- Nitrogen (N₂)
- Helium(Не)
- Hydrogen(Н₂)
- Argon(Ar)

>1*10¹¹
>1*10⁸
5*10⁵
>1*10¹¹

>1*10¹¹
>1*10⁷
2*10⁵
>1*10¹¹

>1*10¹¹
>1*10⁷
2*10⁵
>1*10¹¹

Ultimatepressure, Pa, torr

< 1*10^-5 (7.5*10^-8)

< 1*10^-5 (7.5*10^-8)

< 1*10^-5 (7.5*10^-8)

Maximum output working pressure, Pa (Torr)

2000 (15)

800 (6)

800 (6)

Rotation speed RPM

60 000

49 200

49 200

Cooling type

Water cooled

Water cooled

Water cooled

Power consumption

48V/300W

48V/300W

48V/300W

Weight, kg

13.1 - 17.2

15.7 - 20.8

17.1 - 21.5

Technicaldata

ATH
500M

ATH
1300M

ATH
1300MT*

ATH
1603M

ATH
1600MT*

ATH
2303M

ATH
2300MT*

ATH
2800M

ATH
2800MТ*

ATH
3200M

ATH
3200MТ*

RotationspeedRPM

50 000

39 000

39 000

31 000

31 000

31 000

31 000

25 000

25 000

25 000

25 000

Flange (in)

DN 
100

DN 
160

DN 
160

DN 
200

DN 
160

DN 
200

DN
200

DN 
250

DN
200

DN
250

DN 
200

DN
250

DN 
200

DN 
200

DN 
250

DN 
250

DN 
320

DN 
320

Pumping speedsfor,l/s

N₂

340

500

920

1250

920

1250

1200

1220

1230

1270

1250

1850

1250

1850

2050

2050

2600

2600

Ar

270

500

920

1250

920

1250

1100

1150

1130

1180

1200

1750

1200

1750

2000

2000

2400

2400

He

270

340

810

850

810

850

960

960

960

960

1500

1600

1500

1600

2150

2150

2400

2400

H₂

170

190

490

550

490

550

550

550

580

580

1200

1200

1200

1200

1750

1750

1800

1800

Compression ratio

N₂

2*10⁷

10⁷

10⁷

6*10⁷

6*10⁷

>10⁸

>10⁸

>10⁸

>10⁸

>10⁸

>10⁸

Ar

8*10⁶

10⁷

10⁷

6*10⁷

6*10⁷

>10⁸

>10⁸

>10⁸

>10⁸

>10⁸

>10⁸

He

10⁴

10³

10³

8*10³

8*10³

>3*10⁴

>3*10⁴

>3*10⁴

>3*10⁴

>3*10⁴

>3*10⁴

H₂

2*10²

10²

10²

3*10²

3*10²

>10³

>2*10³

>2*10³

>2*10³

>2*10³

>2*10³

Ultimatepressure, Pa, torr

<10^-6 (7,5 *10^-10)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

Maximum input working pressure, Pa (Torr)

130 (1)

50 (0,4)

50 (0,4)

40 (0,3)

2 (1,5 *10^-2)

30 (0,2)

14 (0,1)

26 (0,2)

1 (7,5 *10^-3)

26 (0,2)

1  (7,5 *10^-3)

Maximum output working pressure, Pa (Torr)

270 (2)

150 (1,1)

150 (1,1)

150 (1,1)

100 (0,8)

200 (1,5)

150 (1,1)

150 (1,1)

100 (0,8)

150 (1,1)

100 (0,8)

Max. pumped flow, cm³/
min.

2500

3000

3000

4000

1000

4000

1000

5000

1000

5000

1000

Cooling method

Water

Mountingposition

Inanydesireddirection

Flange (out)

DN40

Run up time, min

<2,5

<5

<5

6

6

8

8

10

10

10

10

Turbine weight, kg

17

34

34

34

34

60

60

85

85

85

85

Controller

Integrated

ACT1300M

ACT1300M

Mag- power/
OBC

ACT1300M/
OBC

Mag- power/
OBC

Mag- power/
OBC

Mag- power

Mag- power

Mag- power

Mag- power

Controller weight, kg

8

8

8

8

8,7

8,7

8,7

8,7

8,7

8,7

Controller power supply

100 to 240V - 50 / 60Hz - single phase

Technical data

ATP 2300M

Connection flange

DN200, ISO F, CF

DN250, ISO F, CF

Pumpingspeed, l/c

N₂

1250

1750

Ar

1200

1650

He

1700

1800

H₂

1700

1700

Compressionratio

N₂

10⁸

Ar

10⁸

He

10⁵

H₂

7*10³

RPM

31 000

Pressure min, Pa, torr

10^-7 (7,5*10^-10)

Maximum input working pressure, Pa (Torr)

5 (0,04)

Maximum output working pressure, Pa (Torr)

150 (1,13)

Dimensions, mm

Height

290

Diameter

315

Weight, kg

52

Model

TMP-203

TMP-303

TMP-403

TMP-803

TMP-1003

TMP-2003

TMP-3203

Cooling method

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

Ultimatepressure, Pa, (torr)

1,3*10^-8 (10^-10)

1,3*10^-8 (10^-10)

1,3*10^-8 (10^-10)

1,3*10^-9 (10^-11)

1,3*10^-9 (10^-11)

1,3*10^-9 (10^-11)

1,3*10^-9 (10^-11)

Maximum allowable inlet pressure(water/air), Pa (torr)

200/1,3 (1,5/0,01)

200/1,3 (1,5/0,01)

200/1,3 (1,5/0,01)

400/1,3 (3/0,01)

400/1,3 (3/0,01)

67/0,4 (0,5/ 0,003)

40/0,4 (0,3/ 0,003)

Maximum allowable outlet pressure (water/air), Pa (torr)

400/40 (3/0,3)

400/40 (3/0,3)

400/40 (3/0,3)

667/40 (5/0,3)

667/40 (5/0,3)

267/40 (2/0,3)

267/40 (2/0,3)

Pumping speed, l/s:

N₂

190

320

420

800

1080

2000

3200

He

140

340

360

800

930

1800

3000

H₂

120

320

340

700

790

1600

2400

Compressionratio:

N₂

1*10⁹

1*10⁹

1*10⁹

1*10⁹

>1*10⁹

1*10⁹

1*10⁹

He

6*10⁴

8*10⁴

8*10⁴

8*10⁴

8*10⁴

7*10⁵

3*10⁵

H₂

4*10³

1*10⁴

1*10⁴

4*10³

4*10³

1,4*10⁴

1*10⁴

Start-up time, min

5 minutes or less

9 minutes or less

13 minutes or less

Mountingposition

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Bake-out temperature at an inlet flange, ^оС

<120

<120

<120

<120

<120

<120

<120

InletflangeISO, ConFlat

DU100

DU100

DU160

DU160

DU200

DU250

DU320

Recommended pumping speed of backing pump in case of gas purge, l/min (m³/h)

>200 (>12)

>200 (>12)

>200 (>12)

>500 (>30)

>500 (>30)

>500 (>30)

>1500 (>90)

Weight, kg

9

14

14

31

32

55

70

Model

TMP-1103MP

TMP-1103LMP

TMP-1103LMPC

TMP-W2403LMC

FT-3500D

H3153LMC

Cooling method

воздушное

водяное

водяное

водяное

водяное

водяное

Ultimatepressure, Pa, (torr)

1,3*10^-9 (10^-11)

1,3*10^-9 (10^-11)

1,3*10^-8 (10^-10)

1,3*10^-7 (10^-9)

10^-7 (7,5*10^-10)

1.3*10^-5 (10^-7)

Maximum allowable inlet pressure (water/air), Pa (torr)

1,3 (0,01)

6,7 (0,05)

66,7 (0,5)

40 (0,3)

По Ar: 2,1 (1,6*10^-2)

1,33 (10^-2)

Maximum allowable outlet pressure (water/air), Pa (torr)

267 (2)

800 (6)

800 (6)

267 (2)

По Ar: 1330 (10)

270 (2)

Pumping speed, l/s:

N₂

1080

1080

1080

2100

2300

3270

2950

Argon

1040

1040

1040

2000

-

-

-

H₂

800

800

800

1770

-

-

3000

He

-

-

-

2240

-

-

3000

Compressionratio:

N₂

>10⁹

>10⁹

>10⁹

1*10¹¹

5*10⁹

>10⁷

Argon

10⁷

10⁷

10⁷

По He: 4*10⁶

-

-

H₂

10⁶

10⁶

10⁶

1*10⁵

1*10⁶

10⁵ (for H₂ и He)

Start-up time, min

5 minutes or less

5 minutes or less

5 minutes or less

12 minutes or less

18 minutes or less

18 minutes or less

Mountingposition

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Bake-out temperature at an inlet flange, ^оС

<120

<120

<120

<120

40

<120

Inlet flangeISO, ConFlat

DU200

DU 200

DU 200

DU 250

JIS VG250

JIS VG350

DU 320

Weight, kg

32

32

32

72

88

80

Model

TMP-V1704LM

TMP-V2304LM

TMP-V3304LM (F)

TMP-V3304LMC (F)

Cooling method

Water

Ultimatepressure, Pa, (torr)

10^-7 (10^-9)

10^-6 (10^-8)

10^-7 (10^-9)

10^-7 (10^-9)

Maximum allowable inlet pressure (water/air), Pa (torr)

4,5 (0,03)

7 (0,05)

Maximum allowable outlet pressure (water/air), Pa (torr)

200 (1,5)

270 (2,0)

Pumping speed, l/s:

N₂

1400

2100

3200

Argon

1350

2000

3100

Compressionratio:

N₂

10⁸

10⁹

He

10³

10⁵

H₂

10²

10³

Ratedspeed,rpm

33700

27600

Start-up time, min

менее 9

менее 16

Maximum allowable Argon gas flow rate, sccm

600

1900

Mountingposition

Inanydesireddirection

Max. temperature at an inlet flange, ^оС

< 120

Inlet flange

ISO200B

ISO250B

ISO320B

Outlet flange

KF40

Weight, kg

60

56

94

Recommended pumping speed of backing pump in case of gas purge, l/min (m³/h)

>1500 (90)