Dry fore-vacuum pumps Anest Iwata (Japan)

Dry fore-vacuum pumps

Dry fore-vacuum pumps

ISP

Anest Iwata ISP Series Scroll Pumps

Pump model

ISP-50

ISP-90

ISP-250C

ISP-500C

ISP-1000

Pumping Speeds 50 (Hz)/ 60 (Hz), L/min (m3/hr)

50 (Hz)
1.77 CFM
50.0 L/min
0.83 L/s
3.00 m3/hr

60 (Hz)
2.10 CFM
59.5 L/min
0.99 L/s
3.57 m3/hr

 

50 (Hz)
2.83 CFM
80.0 L/min
1.33 L/s
4.80 m3/hr

60 (Hz)
3.50 CFM
99.1 L/min
1.64 L/s
5.95 m3/hr

 

50 (Hz)
7.65 CFM
216 L/min
3.61 L/s
13.0 m3/hr

60 (Hz)
9.10 CFM
257 L/min
4.28 L/s
15.5 m3/hr

 

50 (Hz)
15.3 CFM
433 L/min
7.22 L/s
26.0 m3/hr

60 (Hz)
18.3 CFM
518 L/min
8.60 L/s
31.1 m3/hr

 

50 (Hz)
30.6 CFM
866 L/min
14.4 L/s
52.0 m3/hr

60 (Hz)
36.5 CFM
1033 L/min
17.2 L/s
62.0 m3/hr

 

Ultimate Pressure Pa (torr)

20 (0,15)

5 (3,8*10-2)

1,6 (1,2*10-2)

1 (7,5*10-3)

1 (7,5*10-3)

Motor Power HP (kW)

0.20 ( 0.10 )

0.20 ( 0.15 )

0.54 ( 0.40 )

0.82 ( 0.60 )

1.90 ( 1.40 )

Inlet Flange

KF25

KF25

KF25

KF40

KF40

Exhaust Flange

KF16

KF16

KF16

KF25

KF25

Cooling Method(s)

Method
Convection

Method
Convection

Method
Convection

Method
Convection

Method
Convection

Dimensions in. (mm.)

12.5 x 6.10 x 8.94
(317 x 155 x 227 )

12.1 x 8.43 x 8.86
(308 x 214 x 225 )

15.7 x 9.92 x 13.2
(400 x 252 x 336 )

17.4 x 12.9 x 15.6
(443 x 328 x 397 )

19.8 x 15.4 x 16.6
(504 x 390 x 421 )

Weight Lbs (kg)

26.0 ( 12.0 )

30.9 ( 14.0 )

55.0 - 55.2 ( 23.0 - 25.0 )

84.0 - 97.1 ( 38.0 - 44.0 )

132 ( 60.0 )

DVSL

Anest Iwata DVSL Series Scroll Pumps. They can be used for water vapor suction and exhaust.

Pump model

DVSL-100C

DVSL-500C

DVSL-501C

Pumping Speeds 50 (Hz), L/min (m3/hr)

100 (6)

430 (25,8)

430 (25,8)

Ultimate Pressure Pa (torr)

50 (0,38)

30 (0,23)

100 (0,75)

Motor Power HP (kW)

 

 

 

Inlet Flange

KF25

KF25

KF25

Exhaust Flange

KF16

KF25

KF25

Cooling Method(s)

Method
Convection

Method
Convection

Method
Convection

Dimensions in. (mm.)

358х210х215

491х317х280

491х317х280

Weight Lbs (kg)

15

36

36

Kashiyama Dry vacuum pump (Japan)

Dry fore-vacuum pumps

Dry fore-vacuum pumps

  • NeoDry Series are available in 4 different pumping speeds between 250 L/min and 1,000 L/min. Kashiyama NeoDry Pumps are an excellent alternative to rotary vane wet pumps and dry scroll pumps where dry inert gas, high moisture content inert gas, or mildly aggressive gasses require oil-free pumping.
  • MU Series are available in 2 different pumping speeds between 1660 L/min and 20,000 L/min. The world smallest and least power consumption. The pump can be integrated into any equipment easily
  • SDL Series - Higher pumping speed. Support larger diameter wafer, larger Flat Panel Display (FPD) substrate and Solar applications. Higher pumping speed minimises the tact time for large load lock chamber.
  • SDE Series - Dry pumps reliable for all applications. Energy-saving feature combined with the reiability, SDE Series achieved lower running cost. High corrosion resistance from structural materials and temperature control
  • NeoDry Series 15C

    NeoDry Series, pumping speeds between 250 L/min and 1,000

    Specification

    SDL25K

    SDL40K

    Max. pumping speed (L/min)(m3/hr)

    25,000 (1500)

    40,000 (2400)

    UltimatePressure Pa (torr)

    0,8 (6*10-3)

    0,5 (3,75*10-3)

    Inlet Flange

    NW100

    NW160

    Outlet Flange

    NW50

    Power in normal operation

    11,2

    15,0

    Electric power supply

    3 phase AC 200-220V 50/60 Hz

    Dimensions L×W×H (mm)

    1 000х520х1130

    1 200х700х1354

    Weight  (kg)

    610

    740

    pump Kashiyama MU Series

    MU Series, pumping speeds between 1660 L/min and 20,000

    Specification

    SDE90X*

    SDE603X*

    SDE1203X*

    SDE2003

    Max. pumping speed (L/min) (m3/hr)

    1,300 (78)

    10,000 (600)

    20,000 (1200)

    30 000 (1 800)

    UltimatePressure Pa (torr)

    1,3 (0,01)

    0,5 (3,75*10-3)

    0,5 (3,75*10-3)

    0,5 (3,75*10-3)

    Inlet Flange

    NW40

    NW80

    NW100

    NW160

    Outlet Flange

    NW40

    NW40

    NW40

    NW40

    MaximumInletPressure (Pa)

    Atmosphericpressure

    Powerconsumption[kW]

    1,3

    1,5

    2,0

    4,0

    Electric Power

    3phaseAC200-220V50/60Hz

    SupplyPower in normal operation (kW)*

    2.8

    3.1

    3.6

    40

    Purge N2Gas Supply

    0-60SLM

    CoolingWaterSupply

    4L/minandover

    ElectricPowerCapacity (kVA)

    6,5

    10,5

    13,0

    17,6

    Dimensions L×W×H (mm)

    690*370*551

    760*400*906

    900*400*906

    1 000*500*1 090

    Weight (kg)

    150

    260

    310

    495

    GXS Dry screw vacuum pumps Edwards (England)

    Dry fore-vacuum pumps

    Dry fore-vacuum pumps

    Винтовые насосы без бустера

    Screw pumps with no booster

    Technical data

    GXS160

    GXS250

    GXS450

    GXS750

    Peal pumping speed (m3/hr)

    2 667 (160)

    4 167 (250)

    7 500 (450)

    12 333 (740)

    Ultimate pressure (mbar)

    1,2x10-2

    9x10-3

    1x10-2

    8x10-3

    Ultimate pressure without purge (mbar)

    7x10-3

    4x10-3

    5x10-3

    3x10-3

    Cooling water Temperature0C

    5-40

    Maximum exhaust pressure, mbar

    1400

    Electric motor power, kW

    7,5

    11

    22

    Full Load Power (kW)

    ultimate pressure

    peak pumping load

     

    3,8

    5,0

     4

    9

    7,2

    17,3

    10

    37

    Vacuum couplings

    Inlet

    ISO63

    ISO100

    ISO100

    Exhaust

    NW40

    NW50

    IP degree

    31

    Screw pumps with booster

    Technical data

    GXS160

    /1750

    GXS250

    /2600

    GXS450

    /2600

    GXS450 /4200

    GXS750 /2600

    GXS750 /4200

    Peal pumping speed (m3/hr)

    20 000 (1200 )

    31 667 (1900)

    36 667 (2200)

    50 433 (3026)

    38 333 (2300)

    57 500 (3450)

    Ultimate pressure (mbar)

    7x10-4

    5x10-4

    5,4x10-4

     

     

     

    Ultimate pressure without purge (mbar)

    7x10-4

    5x10-4

    5x10-4

    5x10-4

    5x10-4

    7x10-4

    Cooling water Temperature0C

    5-40

    Maximum exhaust pressure, mbar

    1400

    Electric motor power, kW

    7,5

    11

    22

    Booster electric motor power, kW

    5,5

    7,5

    Full Load Power (kW)

    ultimate pressure

    peak pumping load

     

     

    5,1

    7,4

     

    5,3

    9,7

     

    8,8

    20

     

    9,4

    21,1

     

    11,1

    40

     

    11,5

    40

    Vacuum couplings

    Inlet

    ISO100

    ISO160

    Exhaust

    NW40

    NW50

    IP degree

    31

    Documents

    QMS Certificates and permissions Equipment Patents Product overview Support information
    Certificate of conformity.sheet 1
    Certificate of conformity.sheet 2
    Quality certificate. Road equipment
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