Vacuum pumps

Dry fore-vacuum pumps Anest Iwata (Japan)

Dry fore-vacuum pumps

Description

Anest Iwata ISP Series Scroll Pumps

Pump model

ISP-50

ISP-90

ISP-250C

ISP-500C

ISP-1000

Pumping Speeds 50 (Hz)/ 60 (Hz), L/min (m3/hr)

50 (Hz)
1.77 CFM
50.0 L/min
0.83 L/s
3.00 m3/hr

60 (Hz)
2.10 CFM
59.5 L/min
0.99 L/s
3.57 m3/hr

50 (Hz)
2.83 CFM
80.0 L/min
1.33 L/s
4.80 m3/hr

60 (Hz)
3.50 CFM
99.1 L/min
1.64 L/s
5.95 m3/hr

50 (Hz)
7.65 CFM
216 L/min
3.61 L/s
13.0 m3/hr

60 (Hz)
9.10 CFM
257 L/min
4.28 L/s
15.5 m3/hr

50 (Hz)
15.3 CFM
433 L/min
7.22 L/s
26.0 m3/hr

60 (Hz)
18.3 CFM
518 L/min
8.60 L/s
31.1 m3/hr

50 (Hz)
30.6 CFM
866 L/min
14.4 L/s
52.0 m3/hr

60 (Hz)
36.5 CFM
1033 L/min
17.2 L/s
62.0 m3/hr

Ultimate Pressure Pa (torr)

20 (0,15)

5 (3,8*10^-2)

1,6 (1,2*10^-2)

1 (7,5*10^-3)

Motor Power HP (kW)

0.20 ( 0.10 )

0.20 ( 0.15 )

0.54 ( 0.40 )

0.82 ( 0.60 )

1.90 ( 1.40 )

Inlet Flange

KF25

KF40

Exhaust Flange

KF16

KF25

Cooling Method(s)

Method
Convection

Dimensions in. (mm.)

12.5 x 6.10 x 8.94
(317 x 155 x 227 )

12.1 x 8.43 x 8.86
(308 x 214 x 225 )

15.7 x 9.92 x 13.2
(400 x 252 x 336 )

17.4 x 12.9 x 15.6
(443 x 328 x 397 )

19.8 x 15.4 x 16.6
(504 x 390 x 421 )

Weight Lbs (kg)

26.0 ( 12.0 )

30.9 ( 14.0 )

55.0 - 55.2 ( 23.0 - 25.0 )

84.0 - 97.1 ( 38.0 - 44.0 )

132 ( 60.0 )

DVSL

Anest Iwata DVSL Series Scroll Pumps. They can be used for water vapor suction and exhaust.

Pump model	DVSL-100C	DVSL-500C	DVSL-501C
Pumping Speeds 50 (Hz), L/min (m3/hr)	100 (6)	430 (25,8)	430 (25,8)
Ultimate Pressure Pa (torr)	50 (0,38)	30 (0,23)	100 (0,75)
Motor Power HP (kW)
Inlet Flange	KF25	KF25	KF25
Exhaust Flange	KF16	KF25	KF25
Cooling Method(s)	Method Convection	Method Convection	Method Convection
Dimensions in. (mm.)	358х210х215	491х317х280	491х317х280
Weight Lbs (kg)	15	36	36

Kashiyama Dry vacuum pump (Japan)

Dry fore-vacuum pumps

Description

NeoDry Series are available in 4 different pumping speeds between 250 L/min and 1,000 L/min. Kashiyama NeoDry Pumps are an excellent alternative to rotary vane wet pumps and dry scroll pumps where dry inert gas, high moisture content inert gas, or mildly aggressive gasses require oil-free pumping.

MU Series are available in 2 different pumping speeds between 1660 L/min and 20,000 L/min. The world smallest and least power consumption. The pump can be integrated into any equipment easily

SDL Series - Higher pumping speed. Support larger diameter wafer, larger Flat Panel Display (FPD) substrate and Solar applications. Higher pumping speed minimises the tact time for large load lock chamber.

SDE Series - Dry pumps reliable for all applications. Energy-saving feature combined with the reiability, SDE Series achieved lower running cost. High corrosion resistance from structural materials and temperature control

NeoDry Series 15C

NeoDry Series, pumping speeds between 250 L/min and 1,000

Specification	SDL25K	SDL40K
Max. pumping speed (L/min)(m3/hr)	25,000 (1500)	40,000 (2400)
UltimatePressure Pa (torr)	0,8 (6*10^-3)	0,5 (3,75*10^-3)
Inlet Flange	NW100	NW160
Outlet Flange	NW50
Power in normal operation	11,2	15,0
Electric power supply	3 phase AC 200-220V 50/60 Hz
Dimensions L×W×H (mm)	1 000х520х1130	1 200х700х1354
Weight (kg)	610	740

pump Kashiyama MU Series

MU Series, pumping speeds between 1660 L/min and 20,000

Specification	SDE90X*	SDE603X*	SDE1203X*	SDE2003
Max. pumping speed (L/min) (m3/hr)	1,300 (78)	10,000 (600)	20,000 (1200)	30 000 (1 800)
UltimatePressure Pa (torr)	1,3 (0,01)	0,5 (3,75*10^-3)	0,5 (3,75*10^-3)	0,5 (3,75*10^-3)
Inlet Flange	NW40	NW80	NW100	NW160
Outlet Flange	NW40	NW40	NW40	NW40
MaximumInletPressure (Pa)	Atmosphericpressure
Powerconsumption[kW]	1,3	1,5	2,0	4,0
Electric Power	3phaseAC200-220V50/60Hz
SupplyPower in normal operation (kW)*	2.8	3.1	3.6	40
Purge N2Gas Supply	0-60SLM
CoolingWaterSupply	4L/minandover
ElectricPowerCapacity (kVA)	6,5	10,5	13,0	17,6
Dimensions L×W×H (mm)	690370551	760400906	900400906	1 0005001 090
Weight (kg)	150	260	310	495

GXS Dry screw vacuum pumps Edwards (England)

Dry fore-vacuum pumps

Description

Винтовые насосы без бустера

Screw pumps with no booster

Technical data	GXS160	GXS250	GXS450	GXS750
Peal pumping speed (m3/hr)	2 667 (160)	4 167 (250)	7 500 (450)	12 333 (740)
Ultimate pressure (mbar)	1,2x10^-2	9x10^-3	1x10^-2	8x10^-3
Ultimate pressure without purge (mbar)	7x10^-3	4x10^-3	5x10^-3	3x10^-3
Cooling water Temperature⁰C	5-40
Maximum exhaust pressure, mbar	1400
Electric motor power, kW	7,5		11	22
Full Load Power (kW) ultimate pressure peak pumping load	3,8 5,0	4 9	7,2 17,3	10 37
Vacuum couplings Inlet	ISO63 ISO100		ISO100
Exhaust	NW40		NW50
IP degree	31

Screw pumps with booster

Technical data	GXS160 /1750	GXS250 /2600	GXS450 /2600	GXS450 /4200	GXS750 /2600	GXS750 /4200
Peal pumping speed (m3/hr)	20 000 (1200 )	31 667 (1900)	36 667 (2200)	50 433 (3026)	38 333 (2300)	57 500 (3450)
Ultimate pressure (mbar)	7x10^-4	5x10^-4	5,4x10^-4
Ultimate pressure without purge (mbar)	7x10^-4	5x10^-4	5x10^-4	5x10^-4	5x10^-4	7x10^-4
Cooling water Temperature⁰C	5-40
Maximum exhaust pressure, mbar	1400
Electric motor power, kW	7,5	11			22
Booster electric motor power, kW	5,5		7,5
Full Load Power (kW) ultimate pressure peak pumping load	5,1 7,4	5,3 9,7	8,8 20	9,4 21,1	11,1 40	11,5 40
Vacuum couplings Inlet	ISO100	ISO160
Exhaust	NW40	NW50
IP degree	31

Dry fore-vacuum pumps Anest Iwata (Japan)

Dry fore-vacuum pumps

Kashiyama Dry vacuum pump (Japan)

Dry fore-vacuum pumps

GXS Dry screw vacuum pumps Edwards (England)

Dry fore-vacuum pumps

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