Dry fore-vacuum pumps

Vacuum pumps

Dry fore-vacuum pumps

Dry fore-vacuum pumps Anest Iwata (Japan)
ISP

Anest Iwata ISP Series Scroll Pumps

Pump model

ISP-50

ISP-90

ISP-250C

ISP-500C

ISP-1000

Pumping Speeds 50 (Hz)/ 60 (Hz), L/min (m3/hr)

50 (Hz)
1.77 CFM
50.0 L/min
0.83 L/s
3.00 m3/hr

60 (Hz)
2.10 CFM
59.5 L/min
0.99 L/s
3.57 m3/hr

 

50 (Hz)
2.83 CFM
80.0 L/min
1.33 L/s
4.80 m3/hr

60 (Hz)
3.50 CFM
99.1 L/min
1.64 L/s
5.95 m3/hr

 

50 (Hz)
7.65 CFM
216 L/min
3.61 L/s
13.0 m3/hr

60 (Hz)
9.10 CFM
257 L/min
4.28 L/s
15.5 m3/hr

 

50 (Hz)
15.3 CFM
433 L/min
7.22 L/s
26.0 m3/hr

60 (Hz)
18.3 CFM
518 L/min
8.60 L/s
31.1 m3/hr

 

50 (Hz)
30.6 CFM
866 L/min
14.4 L/s
52.0 m3/hr

60 (Hz)
36.5 CFM
1033 L/min
17.2 L/s
62.0 m3/hr

 

Ultimate Pressure Pa (torr)

20 (0,15)

5 (3,8*10-2)

1,6 (1,2*10-2)

1 (7,5*10-3)

1 (7,5*10-3)

Motor Power HP (kW)

0.20 ( 0.10 )

0.20 ( 0.15 )

0.54 ( 0.40 )

0.82 ( 0.60 )

1.90 ( 1.40 )

Inlet Flange

KF25

KF25

KF25

KF40

KF40

Exhaust Flange

KF16

KF16

KF16

KF25

KF25

Cooling Method(s)

Method
Convection

Method
Convection

Method
Convection

Method
Convection

Method
Convection

Dimensions in. (mm.)

12.5 x 6.10 x 8.94
(317 x 155 x 227 )

12.1 x 8.43 x 8.86
(308 x 214 x 225 )

15.7 x 9.92 x 13.2
(400 x 252 x 336 )

17.4 x 12.9 x 15.6
(443 x 328 x 397 )

19.8 x 15.4 x 16.6
(504 x 390 x 421 )

Weight Lbs (kg)

26.0 ( 12.0 )

30.9 ( 14.0 )

55.0 - 55.2 ( 23.0 - 25.0 )

84.0 - 97.1 ( 38.0 - 44.0 )

132 ( 60.0 )

DVSL

Anest Iwata DVSL Series Scroll Pumps. They can be used for water vapor suction and exhaust.

Pump model

DVSL-100C

DVSL-500C

DVSL-501C

Pumping Speeds 50 (Hz), L/min (m3/hr)

100 (6)

430 (25,8)

430 (25,8)

Ultimate Pressure Pa (torr)

50 (0,38)

30 (0,23)

100 (0,75)

Motor Power HP (kW)

 

 

 

Inlet Flange

KF25

KF25

KF25

Exhaust Flange

KF16

KF25

KF25

Cooling Method(s)

Method
Convection

Method
Convection

Method
Convection

Dimensions in. (mm.)

358х210х215

491х317х280

491х317х280

Weight Lbs (kg)

15

36

36

  • NeoDry Series are available in 4 different pumping speeds between 250 L/min and 1,000 L/min. Kashiyama NeoDry Pumps are an excellent alternative to rotary vane wet pumps and dry scroll pumps where dry inert gas, high moisture content inert gas, or mildly aggressive gasses require oil-free pumping.
  • MU Series are available in 2 different pumping speeds between 1660 L/min and 20,000 L/min. The world smallest and least power consumption. The pump can be integrated into any equipment easily
  • SDL Series - Higher pumping speed. Support larger diameter wafer, larger Flat Panel Display (FPD) substrate and Solar applications. Higher pumping speed minimises the tact time for large load lock chamber.
  • SDE Series - Dry pumps reliable for all applications. Energy-saving feature combined with the reiability, SDE Series achieved lower running cost. High corrosion resistance from structural materials and temperature control
  • NeoDry Series 15C

    NeoDry Series, pumping speeds between 250 L/min and 1,000

    Specification

    SDL25K

    SDL40K

    Max. pumping speed (L/min)(m3/hr)

    25,000 (1500)

    40,000 (2400)

    UltimatePressure Pa (torr)

    0,8 (6*10-3)

    0,5 (3,75*10-3)

    Inlet Flange

    NW100

    NW160

    Outlet Flange

    NW50

    Power in normal operation

    11,2

    15,0

    Electric power supply

    3 phase AC 200-220V 50/60 Hz

    Dimensions L×W×H (mm)

    1 000х520х1130

    1 200х700х1354

    Weight  (kg)

    610

    740

    pump Kashiyama MU Series

    MU Series, pumping speeds between 1660 L/min and 20,000

    Specification

    SDE90X*

    SDE603X*

    SDE1203X*

    SDE2003

    Max. pumping speed (L/min) (m3/hr)

    1,300 (78)

    10,000 (600)

    20,000 (1200)

    30 000 (1 800)

    UltimatePressure Pa (torr)

    1,3 (0,01)

    0,5 (3,75*10-3)

    0,5 (3,75*10-3)

    0,5 (3,75*10-3)

    Inlet Flange

    NW40

    NW80

    NW100

    NW160

    Outlet Flange

    NW40

    NW40

    NW40

    NW40

    MaximumInletPressure (Pa)

    Atmosphericpressure

    Powerconsumption[kW]

    1,3

    1,5

    2,0

    4,0

    Electric Power

    3phaseAC200-220V50/60Hz

    SupplyPower in normal operation (kW)*

    2.8

    3.1

    3.6

    40

    Purge N2Gas Supply

    0-60SLM

    CoolingWaterSupply

    4L/minandover

    ElectricPowerCapacity (kVA)

    6,5

    10,5

    13,0

    17,6

    Dimensions L×W×H (mm)

    690*370*551

    760*400*906

    900*400*906

    1 000*500*1 090

    Weight (kg)

    150

    260

    310

    495

    Винтовые насосы без бустера

    Screw pumps with no booster

    Technical data

    GXS160

    GXS250

    GXS450

    GXS750

    Peal pumping speed (m3/hr)

    2 667 (160)

    4 167 (250)

    7 500 (450)

    12 333 (740)

    Ultimate pressure (mbar)

    1,2x10-2

    9x10-3

    1x10-2

    8x10-3

    Ultimate pressure without purge (mbar)

    7x10-3

    4x10-3

    5x10-3

    3x10-3

    Cooling water Temperature0C

    5-40

    Maximum exhaust pressure, mbar

    1400

    Electric motor power, kW

    7,5

    11

    22

    Full Load Power (kW)

    ultimate pressure

    peak pumping load

     

    3,8

    5,0

     4

    9

    7,2

    17,3

    10

    37

    Vacuum couplings

    Inlet

    ISO63

    ISO100

    ISO100

    Exhaust

    NW40

    NW50

    IP degree

    31

    Screw pumps with booster

    Technical data

    GXS160

    /1750

    GXS250

    /2600

    GXS450

    /2600

    GXS450 /4200

    GXS750 /2600

    GXS750 /4200

    Peal pumping speed (m3/hr)

    20 000 (1200 )

    31 667 (1900)

    36 667 (2200)

    50 433 (3026)

    38 333 (2300)

    57 500 (3450)

    Ultimate pressure (mbar)

    7x10-4

    5x10-4

    5,4x10-4

     

     

     

    Ultimate pressure without purge (mbar)

    7x10-4

    5x10-4

    5x10-4

    5x10-4

    5x10-4

    7x10-4

    Cooling water Temperature0C

    5-40

    Maximum exhaust pressure, mbar

    1400

    Electric motor power, kW

    7,5

    11

    22

    Booster electric motor power, kW

    5,5

    7,5

    Full Load Power (kW)

    ultimate pressure

    peak pumping load

     

     

    5,1

    7,4

     

    5,3

    9,7

     

    8,8

    20

     

    9,4

    21,1

     

    11,1

    40

     

    11,5

    40

    Vacuum couplings

    Inlet

    ISO100

    ISO160

    Exhaust

    NW40

    NW50

    IP degree

    31

    Oil fore-vacuum pumps

    Vacuum pumps

    Oil fore-vacuum pumps

    Rotary Vane Pumps Pfeiffer (Germany)

    Pfeiffer Vacuum rotary vane pumps cover an extremely wide range of pumping DuoLine

    Pfeiffer Vacuum rotary vane pumps cover an extremely wide range of pumping speeds from 1.25 to 250 m3/h

    * Cooling method, standard, Air

    Модель

    DUO 1.6
    DUO 1.6 M

    DUO 3
    DUO 3 M

    DUO 5 M
    DUO 5 МС

    DUO 6
    DUO 6 M

    DUO 10 M
    DUO 10 МС

    DUO 11
    DUO 11 М

    DUO 20 M
    DUO 20 МС

    DUO 35
    DUO 35 М
    DUO 35 MС

    DUO 65
    DUO 65 М
    DUO 65 MС

    DUO 125
    DUO 125 М

    DUO 255
    DUO 255 М

    Flange
    - in, ISO-K(KF)
    - out, ISO-K(KF)


    DN16
    DN16


    DN16
    DN16


    DN16
    DN16


    DN16
    DN16


    DN25
    DN25


    DN16
    DN16


    DN25
    DN25


    DN40
    DN40


    DN40
    DN40


    DN63
    DN63


    DN100
    DN100

    Pumping speed, м3/ч

    1,25

    2,5

    5

    5

    10

    9

    20

    32

    62

    120

    250

    Ultimate pressure without gas ballast, mbar

    3*10-3

    3*10-3

    4*10-3

    3*10-3

    3*10-3

    3*10-3

    2*10-3

    2*10-3

    2*10-3

    2*10-3

    3*10-3

    Ultimate pressure with gas ballast, mbar

    3*10-3

    3*10-3

    7*10-3

    3*10-3

    6*10-3

    3*10-3

    4*10-3

    3*10-3

    3*10-3

    4*10-3

    4*10-3

    Operatingfluidamoun, l

    0.4

    0.4

    0.75

    0.5

    1.0

    0.6

    1.1

    3.2

    4.2

    14

    25

    Noise level, dBA

    48

    53

    55 / 57

    53

    55 / 57

    55

    55 / 57

    61

    61

    75

    75

    water vapor productivity, g / h

    15

    30

    90

    90

    210

    210

    400

    500

    1000

    1800

    4350

    Rotor speed, RPMin, at 50 Hz

    1500

    1500

    1500

    3000

    1500

    3000

    1500

    1500

    1500

    1500

    1500

    Power supply

    1f 220-240 v

    1f 220-240 v

    3f 380-420 v/
    1f 220-240 v

    1f 230-240 v

    3f 380-420 v/
    1f 220-240 v

    1f 208-240 v

    3f 380-420 v/
    1f 220-240 v

    3f 380- 420 v

    3f 380- 420 v

    3f 380- 420 v

    3f 380- 420 v

    Power consumption kW

    0.075

    0.15

    0.25 / 0.37

    0.2

    0.37 / 0.45

    0.25

    0.55 / 0.75

    1.1

    1.5

    4.0

    7.5

    Weight, kg

    9.6

    11.3

    19 / 25

    16 / 17.5

    24 / 30

    17 / 19

    33 / 44

    68

    75

    225

    360

    Pascal series single-stage and two-stage rotary vane vacuum pumps Pascal

    Pascal series single-stage and two-stage rotary vane vacuum pumps (pumping speed up 1.25 to 60 m3/h)

    Model

    1005SD

    1015SD

    Inlet flange, ISO-KF
    Exhaust flange, ISO-KF


    DN25
    DN25


    DN25
    DN25

    Pumping speed, l/min (m3/h)

    83.3 (5)

    233 (14)

    Ultimate pressure without gas ballast, Pa (torr)

    5 (0.04)

    5 (0.04)

    Ultimate pressure with gas ballast, Pa (torr)

    400 (3)

    700 (5.3)

    Oil capacity

    0.8

    1.0

    Noise level, dBA

    57

    57

    Water vapour pumping capacity g/h

    120

    330

    typeofcooling

    Air-cooled

    Air-cooled

    Power supply

    3f 380-420 v/
    1f 220-240 v

    3f 380-420 v/
    1f 220-240 f

    Max nominal power rating 50/60HzkW

    0.55 / 0.45

    0.55 / 0.45

    Weight, kg

    21

    24.5

    Pentaline power saving two stage rotary vane vacuum pumps

    Pentaline power saving two stage rotary vane vacuum pumps (pumping speed up 22 to 34 m3/h)

    Model

    Penta 25

    Penta 35

    Connection flange, inlet, ISO-KF
    Connection flange,outlet ISO-KF


    DN25
    DN25


    DN25
    DN25

    Pumping speed, l/min (m3/h)

    367 (22)

    567 (34)

    Ultimate pressure without gas ballast, Pa (torr)

    0.3 (2.25*10-3)

    0.3 (2.25*10-3)

    Ultimate pressure with gas ballast, Pa (torr)

    0.5 (3.75*10-3)

    0.5 (3.75*10-3)

    Oil capacity

    1.8

    1.5

    Noise level, dBA

    58

    58

    Water vapour pumping capacity g/h

    300

    370

    Rotor speed, RPMin, at 50 Hz

    1800

    1800

    typeofcooling

    Air-cooled

    Air-cooled

    Power supply

    1f 220-240 v

    1f 220-240 v

    Max nominal power rating 50/60Hz kW

    0.41

    0.41

    Weight, kg

    43

    45

    HenaLine single-stage, oil-sealed rotary vane vacuum pumps

    HenaLine single-stage, oil-sealed rotary vane vacuum pumps - (pumping speed up 25 to 1600 m3/h)

    *type of cooling - Air-cooled

    Model

    Hena 25

    Hena 40

    Hena 60

    Hena 100

    Hena 200

    Hena 300

    Hena 400

    Hena 630

    Hena 1000

    Hena 1600

    Connection flange, inlet, ISO-KF
    Connection flange,outlet ISO-KF


    DN40
    DN40


    DN40
    DN40


    DN40
    DN40


    DN40
    DN40


    DN100
    DN100


    DN100
    DN100


    DN100
    DN100


    DN100
    DN100


    DN100
    DN100


    DN160
    DN100

    Pumping speed, l/min (m3/h)

    417 (25)

    667 (40)

    1050 (63)

    1667 (100)

    3333 (200)

    5000 (300)

    6667 (400)

    10500 (630)

    16670 (1000)

    26667 (1600)

    Ultimate pressure without gas ballast, Pa (torr)

    20 (0.15)

    20 (0.15)

    20 (0.15)

    30 (0.23)

    30 (0.23)

    30 (0.23)

    30 (0.23)

    30 (0.23)

    100 (0.75)

    70 (0.53)

    Ultimate pressure with gas ballast, Pa (torr)

    150 (1.13)

    30 (0.23)

    150 (1.13)

    150 (1.13)

    70 (0.53)

    70 (0.53)

    70 (0.53)

    70 (0.53)

    120 (0.9)

    120 (0.9)

    Oil capacity

    1

    1

    2

    2

    6,5

    6,5

    12

    15

    30

    36

    Noise level, dBA

    60

    63

    64 / 65

    65

    72

    74

    77

    77

    82

    82

    Water vapour pumping capacity g/h

    900

    1200

    1800

    2800

    4000

    5000

    9000

    18000

    19000

    24000

    Rotor speed, RPMin, at 50 Hz

    1500

    1500

    1500

    1500

    1500

    1500

    1000

    1000

    1000

    1000

    Power supply

    3f 380-420v/ 
    1f 220-240 v

    3f 380-420 v/ 
    1 220-240 v

    3f 380-420 v/ 
    1f 220-240 v

    3f 380- 420 v

    3f 380- 420 v

    3f 380- 420 v

    3f 380- 420 v

    3f 380- 420 v

    3f 380- 420 v

    3f 380- 420 v

    Max nominal power rating 50/60Hz kW

    0.9 / 1.1

    1.4 / 1.8

    2.0 / 1.8

    2.5

    5.5

    7.5

    13.5

    15

    22

    30

    Weight, kg

    35 / 42

    48 / 40

    68 / 60

    77

    182

    227

    535

    650

    1200

    1474

    UnoLine Plus series single-stage rotary vane vacuum pumps

    UnoLine Plus series single-stage rotary vane vacuum pumps(pumping speed up 250 to 500 m3/h)

    Model

    BA 251

    BA 501

    Connection flange, inlet, ISO-F
    Connection flange,outlet ISO-K


    DN63
    DN63


    DN100
    DN100

    Pumping speed, l/min (m3/h)

    4167 (250)

    8333 (500)

    Ultimate pressure without gas ballast, Pa (torr)

    6 (0.05)

    6 (0.05)

    Ultimate pressure with gas ballast, Pa (torr)

    100 (0.75)

    100 (0.75)

    Oil capacity

    17

    45

    Noise level, dBA

    63

    65

    Water vapour pumping capacity g/h

    7000

    14000

    Rotor speed, RPMin, at 50 Hz

    1500

    1500

    typeofcooling

    Water cooled

    Water cooled

    Power supply

    3f 380-420 v

    3f 380-420 v

    Max nominal power rating 50/60Hz kW

    11

    15

    Weight, kg

    570

    1100




    Edwards EM Series (Small) - E2M18

    Edwards EM Series (Small) - E2M18

    Model

    Pumping speed, l/min (m3/h)

    The number of stages pumping

    Ultimate pressure

    Max water vapour pumping rate, kg/h

    without gas ballast, Pa (torr)

    with gas ballast, Pa (torr)

    E2M0.7

    12.5  (0.75)

    2

    0.3 (2.3 х 10−3)

    20 (0.15)

    0.008

    E2M1.5

    26.7 (1.6)

    2

    0.25 (1.8 х 10−3)

    2.5 (1.9 х 10−2)

    0.016

    RV3

    55 (3.3)

    2

    0.2 (1.5 х 10−3)

    3 (2.3 х 10−2)

    0.22

    RV5

    85 (5.1)

    2

    0.2 (1.5 х 10−3)

    3 (2.3 х 10−2)

    0.22

    RV8

    142 (8.5)

    2

    0.2 (1.5 х 10−3)

    3.0 (2.3 х 10−2)

    0.22

    RV12

    200 (12.0)

    2

    0.2 (1.5 х 10−3)

    3.0 (2.3 х 10−2)

    0.29

    E1M18

    283 (17.0)

    1

    3.0 (2.2 х 10−2)

    65 (4.8 х 10−1)

    0.65

    E2M18

    283 (17.0)

    2

    0.1 (7.5 х 10−4)

    1.5 (1.1 х 10−2)

    0.30

    E2M28

    458.3 (27.5)

    2

    0.1 (7.5 х 10−4)

    1.5 (1.1 х 10−2)

    0.70

    E2M40

    708.3 (42.5)

    2

    0.1 (7.7 х 10−4)

    0.7 (5.4 х 10−3)

    0.2

    E2M80

    1 333 (80)

    2

    0.1 (7.7 х 10−4)

    0.7 (5.4 х 10−3)

    0.3

    E2M175

    2 967 (178)

    2

    0.1 (7.7 х 10−4)

    0.7 (5.4 х 10−3)

    0.3

    E2M275

    4 867 (292 )

    2

    0.1 (7.7 х 10−4)

    0.7 (5.4 х 10−3)

    2.3

    ES65

    983.3 (59)

    1

    15 (0.11)

    100 (0.8)

    1.3

    ES100

    1 500 (90)

    1

     

    200 (1.5)

    2.6

    ES200

    3 167 (190)

    1

    8 (0.06)

    100 (0.8)

    2.2

    ES300

    4 583 (275)

    1

     

    200 (1.5)

    2.3

    ES630

    9 583 (575)

    1

    10 (0.08)

    100 (0.8)

    5.6


    Насос серии ES (ES300 - пример)

    Edwards ES Series–ES300

    Appearance of RVP Pumps

    Appearance of RVP Pumps

    Parameter name

    RVP-6

    RVP12

    RVP-24

    RVP-36

    RVP-48

    RVP-60

    RVP-90

    Pumping speed, l/min (m3/h)

    90 (5.4)

    180 (10.8)

    360 (21.6)

    540 (32.4)

    840 (50.4)

    1 080 (64.8)

    1 500 (90)

    Ultimate pressure

    Partial
    Pressure, Pa (Torr)

    4×10-2 (3×10-4)

    4×10-2 (3×10-4)

    4×10-2 (3×10-4)

    4×10-2 (3×10-4)

    4×10-2 (3×10-4)

    4×10-2 (3×10-4)

    4×10-2 (3×10-4)

    Full
    Pressure, Pa (Torr)

    4×10-1 (3×10-3)

    4×10-1 (3×10-3)

    4×10-1 (3×10-3)

    4×10-1 (3×10-3)

    4×10-1 (3×10-3)

    4×10-1 (3×10-3)

    4×10-1 (3×10-3)

    Oil capacity

    1.3

    1.1

    1.4

    1.8

    3.8

    5.5

    6.5

    Connection flange, inlet

    KF25

    KF25

    KF25

    KF40

    KF40

    KF40

    KF40

    Connection flange, outlet

    KF25

    KF25

    KF25

    KF25

    KF40

    KF40

    KF40

    Power rating, kW

    0.4

    0.4

    0.75

    0.75

    1.5

    2.2

    2.5

    Power supply, V

    220-240

    220-240

    380-415

    220-240

    380-415

    380-415

    380-415

    380-415

    380-415

    Rotor speed, RPMin

    1 450

    1 450

    1 450

    1 450

    1 450

    1 450

    1 450

    Weight, kg

    23

    25

    37

    39

    64

    83

    88

    Turbomolecular Pumps with magnetic suspension

    Vacuum pumps

    Turbomolecular Pumps with magnetic suspension

    Edwards turbopumps
    Edwards STP-iXA4506 series magnetically levitated turbomolecular pump (TMP)

    Edwards STP-iXA4506 series magnetically levitated turbomolecular pump (TMP)

    Model

    Connection flange, inlet

    Pumping speed N2 , l/s

    Pumping speed H2, l/s

    Pumping speedAr, l/s

    CompressionratioN2

    CompressionratioH2

    Max gas flowN2, sccm

    Max gas flowAr, sccm

    Allowable backing pressure

    STP-iX455

    ISO100-K

    300

    300

    -

    >1*108

    >1*104

    -

    -

    6.5×10-6 (5×10-8)

    DN100CF

    1×10-8 (7.5×10-11)

    ISO160-K

    450

    460

    -

    >1*108

    >1*104

    -

    -

    6.5×10-6 (5×10-8)

    DN160CF

    1×10-8 (7.5×10-11)

    STP-iXR1606

    ISO160-F

    900

    600

    -

    >1*108

    1*103

    4700

    1800

    1×10-7 (7.5×10-10)

    VG150

    ISO200-F/

    ISO250-F

    1600

    1200

    -

    >1*108

    1*103

    4700

    1800

    1×10-7 (7.5×10-10)

    VG200

    STP-iXA2206C

    ISO250-F

    2200

    -

    1900

    >1*108

    1*104

    3000

    1400

    1×10-7 (7.5×10-10)

    DN250CF

    STP-iXA3306C

    ISO250-F

    2650

    -

    2300

    >1*108

    2*103

    4000

    2100

    1×10-7 (7.5×10-10)

    DN250CF

    ISO320-F

    3200

    -

    2800

    >1*108

    2*103

    4000

    2100

    1×10-7 (7.5×10-10)

    DN320CF

    STP-iXA4506C

    ISO320-F

    4000

    2700

    -

    >1*108

    1*103

    4300

    2600

    1×10-7 (7.5×10-10)

    STP iXA3306C 5-axis Magnetic Bearing Turbo-Molecular Pump

    STP iXA3306C 5-axis Magnetic Bearing Turbo-Molecular Pump

    Model

    Connection flange, inlet

    Pumping speed N2, l/s

    Pumping speed H2, l/s

    Pumping speed Ar, l/s

    Compressionratio N2

    Compressionratio H2

    Max gas flow N2, sccm

    Max gas flowAr, sccm

    STP301 / STP301C

    ISO100-K

    300

    300

    >1*108

    >2*104

    2500

    -

    6.5×10-6 (5×10-8)

    DN100CF

    1×10-8 (7.5×10-11)

    STPH451 / STPH451C

    ISO160-F

    480

    300

    >1*108

    103

    2500

    -

    6.5×10-6 (5×10-8)

    DN160CF

    1×10-8 (7.5×10-11)

    STP603 / STP603C

    ISO160-F

    650

    550

    >1*108

    >1*105

    130

    -

    1×10-7 (7.5×10-10)

    DN160CF

    1×10-8 (7.5×10-11)

    STP1003 / STP1003C

    ISO200-F

    1000

    800

    >1*108

    >1*105

    130

    -

    1×10-7 (7.5×10-10)

    DN200CF

    1×10-8 (7.5×10-11)

    STPA803C

    ISO160-F

    800

    520

    >1*108

    1*103

    1500

    -

    1×10-7 (7.5×10-10)

    DN160CF

    STPA1303C

    ISO200-F

    1300

    800

    >1*108

    1*103

    1500

    -

    1×10-7 (7.5×10-10)

    DN200CF

    STPA1603C

    ISO200-F

    1600

    1200

    >1*108

    >7*103

    2500

    -

    1×10-7 (7.5×10-10)

    DN200CF

    STPA2203C

    ISO250-F

    2200

    1700

    >1*108

    >2,5*104

    1500

    -

    1×10-6 (7.5×10-9)

    DN250CF

    STP-XA2703C

    ISO250-F

    2650

    2050

    >1*108

    >6*103

    2300

    1900

    1×10-7 (7.5×10-10)

    DN250CF

    STP-XA3203C

    ISO320-F

    3200

    2300

    >1*108

    >6*103

    2300

    1900

    1×10-7 (7.5×10-10)

    DN320CF

    STP-XA4503C

    ISO320-F

    4000

    2500

    >1*108

    >6*103

    2800

    2150

    1×10-7 (7.5×10-10)

    Turbopumps with hybrid magnetic bearing HiPace M (HiPace 800 M)

    Turbopumps with hybrid magnetic bearing HiPace M (HiPace 800 M)

    Model

    HiPace 300 M

    HiPace 700 M

    HiPace 800 M

    - Flange (in), ISO-K, ISO-F, CF
    - Flange (out), ISO-KF
    - Venting connection


    DN100
    DN16
    G1/8"


    DN160
    DN25
    G1/8"


    DN200
    DN25
    G1/8"

    Pumping speed, l/s
    - Nitrogen(N2)
    - Helium(Не)
    - Hydrogen(Н2)
    - Argon(Ar)


    255
    215
    170
    250


    685
    600
    480
    660


    790
    625
    500
    775

    Compression ratio
    - Nitrogen (N2)
    - Helium(Не)
    - Hydrogen(Н2)
    - Argon(Ar)


    >1*1011
    >1*108
    5*105
    >1*1011


    >1*1011
    >1*107
    2*105
    >1*1011


    >1*1011
    >1*107
    2*105
    >1*1011

    Ultimatepressure, Pa, torr

    < 1*10-5 (7.5*10-8)

    < 1*10-5 (7.5*10-8)

    < 1*10-5 (7.5*10-8)

    Maximum output working pressure, Pa (Torr)

    2000 (15)

    800 (6)

    800 (6)

    Rotation speed RPM

    60 000

    49 200

    49 200

    Cooling type

    Water cooled

    Water cooled

    Water cooled

    Power consumption

    48V/300W

    48V/300W

    48V/300W

    Weight, kg

    13.1 - 17.2

    15.7 - 20.8

    17.1 - 21.5

    ATH-M Series hybrid magnetically levitated turbo pumps (ATH2300M)

    ATH-M Series hybrid magnetically levitated turbo pumps (ATH2300M)

    Technicaldata

    ATH
    500M

    ATH
    1300M

    ATH
    1300MT*

    ATH
    1603M

    ATH
    1600MT*

    ATH
    2303M

    ATH
    2300MT*

    ATH
    2800M

    ATH
    2800MТ*

    ATH
    3200M

    ATH
    3200MТ*

    RotationspeedRPM

    50 000

    39 000

    39 000

    31 000

    31 000

    31 000

    31 000

    25 000

    25 000

    25 000

    25 000

    Flange (in)

    DN 
    100

    DN 
    160

    DN 
    160

    DN 
    200

    DN 
    160

    DN 
    200

    DN
    200

    DN 
    250

    DN
    200

    DN
    250

    DN 
    200

    DN
    250

    DN 
    200

    DN 
    200

    DN 
    250

    DN 
    250

    DN 
    320

    DN 
    320

    Pumping speedsfor,l/s

    N2

    340

    500

    920

    1250

    920

    1250

    1200

    1220

    1230

    1270

    1250

    1850

    1250

    1850

    2050

    2050

    2600

    2600

    Ar

    270

    500

    920

    1250

    920

    1250

    1100

    1150

    1130

    1180

    1200

    1750

    1200

    1750

    2000

    2000

    2400

    2400

    He

    270

    340

    810

    850

    810

    850

    960

    960

    960

    960

    1500

    1600

    1500

    1600

    2150

    2150

    2400

    2400

    H2

    170

    190

    490

    550

    490

    550

    550

    550

    580

    580

    1200

    1200

    1200

    1200

    1750

    1750

    1800

    1800

    Compression ratio

    N2

    2*107

    107

    107

    6*107

    6*107

    >108

    >108

    >108

    >108

    >108

    >108

    Ar

    8*106

    107

    107

    6*107

    6*107

    >108

    >108

    >108

    >108

    >108

    >108

    He

    104

    103

    103

    8*103

    8*103

    >3*104

    >3*104

    >3*104

    >3*104

    >3*104

    >3*104

    H2

    2*102

    102

    102

    3*102

    3*102

    >103

    >2*103

    >2*103

    >2*103

    >2*103

    >2*103

    Ultimatepressure, Pa, torr

    <10-6 (7,5 *10-10)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    <6*10-7 (4,5 *10-9)

    Maximum input working pressure, Pa (Torr)

    130 (1)

    50 (0,4)

    50 (0,4)

    40 (0,3)

    2 (1,5 *10-2)

    30 (0,2)

    14 (0,1)

    26 (0,2)

    1 (7,5 *10-3)

    26 (0,2)

    1  (7,5 *10-3)

    Maximum output working pressure, Pa (Torr)

    270 (2)

    150 (1,1)

    150 (1,1)

    150 (1,1)

    100 (0,8)

    200 (1,5)

    150 (1,1)

    150 (1,1)

    100 (0,8)

    150 (1,1)

    100 (0,8)

    Max. pumped flow, cm3/
    min.

    2500

    3000

    3000

    4000

    1000

    4000

    1000

    5000

    1000

    5000

    1000

    Cooling method

    Water

    Mountingposition

    Inanydesireddirection

    Flange (out)

    DN40

    Run up time, min

    <2,5

    <5

    <5

    6

    6

    8

    8

    10

    10

    10

    10

    Turbine weight, kg

    17

    34

    34

    34

    34

    60

    60

    85

    85

    85

    85

    Controller

    Integrated

    ACT1300M

    ACT1300M

    Mag- power/
    OBC

    ACT1300M/
    OBC

    Mag- power/
    OBC

    Mag- power/
    OBC

    Mag- power

    Mag- power

    Mag- power

    Mag- power

    Controller weight, kg

    8

    8

    8

    8

    8,7

    8,7

    8,7

    8,7

    8,7

    8,7

    Controller power supply

    100 to 240V - 50 / 60Hz - single phase

    * Heated version (MT) available for corrosive applications. ATH-MT pumps are used for particularly chemically active environments, which have a built-in heating jacket that prevents sedimentation on the inner surface of the pumps.

    Гибридный турбомолекулярный насос на магнитном подвесе серии ATP-M для откачки легких газов

    ATP-M Series magnetically levitated turbopumps designed especially for light gas pumping applications

    Pfeiffer Pentaline two-stagevacuum pumps (pumping speed up 22 to 34m3/s)

    Technical data

    ATP 2300M

    Connection flange

    DN200, ISO F, CF

    DN250, ISO F, CF

    Pumpingspeed, l/c

    N2

    1250

    1750

    Ar

    1200

    1650

    He

    1700

    1800

    H2

    1700

    1700

    Compressionratio

    N2

    108

    Ar

    108

    He

    105

    H2

    7*103

    RPM

    31 000

    Pressure min, Pa, torr

    10-7 (7,5*10-10)

    Maximum input working pressure, Pa (Torr)

    5 (0,04)

    Maximum output working pressure, Pa (Torr)

    150 (1,13)

    Dimensions, mm

    Height

    290

    Diameter

    315

    Weight, kg

    52

    Standard line of TMP turbomolecular pump with magnetic levitation

    Standard line of TMP turbomolecular pump with magnetic levitation

    Model

    TMP-203

    TMP-303

    TMP-403

    TMP-803

    TMP-1003

    TMP-2003

    TMP-3203

    Cooling method

    water/air-cooled

    water/air-cooled

    water/air-cooled

    water/air-cooled

    water/air-cooled

    water/air-cooled

    water/air-cooled

    Ultimatepressure, Pa, (torr)

    1,3*10-8 (10-10)

    1,3*10-8 (10-10)

    1,3*10-8 (10-10)

    1,3*10-9 (10-11)

    1,3*10-9 (10-11)

    1,3*10-9 (10-11)

    1,3*10-9 (10-11)

    Maximum allowable inlet pressure(water/air), Pa (torr)

    200/1,3 (1,5/0,01)

    200/1,3 (1,5/0,01)

    200/1,3 (1,5/0,01)

    400/1,3 (3/0,01)

    400/1,3 (3/0,01)

    67/0,4 (0,5/ 0,003)

    40/0,4 (0,3/ 0,003)

    Maximum allowable outlet pressure (water/air), Pa (torr)

    400/40 (3/0,3)

    400/40 (3/0,3)

    400/40 (3/0,3)

    667/40 (5/0,3)

    667/40 (5/0,3)

    267/40 (2/0,3)

    267/40 (2/0,3)

    Pumping speed, l/s:

    N2

    190

    320

    420

    800

    1080

    2000

    3200

    He

    140

    340

    360

    800

    930

    1800

    3000

    H2

    120

    320

    340

    700

    790

    1600

    2400

    Compressionratio:

    N2

    1*109

    1*109

    1*109

    1*109

    >1*109

    1*109

    1*109

    He

    6*104

    8*104

    8*104

    8*104

    8*104

    7*105

    3*105

    H2

    4*103

    1*104

    1*104

    4*103

    4*103

    1,4*104

    1*104

    Start-up time, min

    5 minutes or less

    9 minutes or less

    13 minutes or less

    Mountingposition

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Bake-out temperature at an inlet flange, оС

    <120

    <120

    <120

    <120

    <120

    <120

    <120

    InletflangeISO, ConFlat

    DU100

    DU100

    DU160

    DU160

    DU200

    DU250

    DU320

    Recommended pumping speed of backing pump in case of gas purge, l/min (m3/h)

    >200 (>12)

    >200 (>12)

    >200 (>12)

    >500 (>30)

    >500 (>30)

    >500 (>30)

    >1500 (>90)

    Weight, kg

    9

    14

    14

    31

    32

    55

    70

    High Pumping speed and turbo molecular pumps

    High Pumping speed and turbo molecular pumps

    Model

    TMP-1103MP

    TMP-1103LMP

    TMP-1103LMPC

    TMP-W2403LMC

    FT-3500D

    H3153LMC

    Cooling method

    воздушное

    водяное

    водяное

    водяное

    водяное

    водяное

    Ultimatepressure, Pa, (torr)

    1,3*10-9 (10-11)

    1,3*10-9 (10-11)

    1,3*10-8 (10-10)

    1,3*10-7 (10-9)

    10-7 (7,5*10-10)

    1.3*10-5 (10-7)

    Maximum allowable inlet pressure (water/air), Pa (torr)

    1,3 (0,01)

    6,7 (0,05)

    66,7 (0,5)

    40 (0,3)

    По Ar: 2,1 (1,6*10-2)

    1,33 (10-2)

    Maximum allowable outlet pressure (water/air), Pa (torr)

    267 (2)

    800 (6)

    800 (6)

    267 (2)

    По Ar: 1330 (10)

    270 (2)

    Pumping speed, l/s:

    N2

    1080

    1080

    1080

    2100

    2300

    3270

    2950

    Argon

    1040

    1040

    1040

    2000

    -

    -

    -

    H2

    800

    800

    800

    1770

    -

    -

    3000

    He

    -

    -

    -

    2240

    -

    -

    3000

    Compressionratio:

    N2

    >109

    >109

    >109

    1*1011

    5*109

    >107

    Argon

    107

    107

    107

    По He: 4*106

    -

    -

    H2

    106

    106

    106

    1*105

    1*106

    105 (for H2 и He)

    Start-up time, min

    5 minutes or less

    5 minutes or less

    5 minutes or less

    12 minutes or less

    18 minutes or less

    18 minutes or less

    Mountingposition

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Inanydesireddirection

    Bake-out temperature at an inlet flange, оС

    <120

    <120

    <120

    <120

    40

    <120

    Inlet flangeISO, ConFlat

    DU200

    DU 200

    DU 200

    DU 250

    JIS VG250

    JIS VG350

    DU 320

    Weight, kg

    32

    32

    32

    72

    88

    80

    Pumps with integrated controller

    Pumps with integrated controller (LM - water cooling, LMC - water cooling, resistance to corrosive attack)

    Model

    TMP-V1704LM

    TMP-V2304LM

    TMP-V3304LM (F)

    TMP-V3304LMC (F)

    Cooling method

    Water

    Ultimatepressure, Pa, (torr)

    10-7 (10-9)

    10-6 (10-8)

    10-7 (10-9)

    10-7 (10-9)

    Maximum allowable inlet pressure (water/air), Pa (torr)

    4,5 (0,03)

    7 (0,05)

    Maximum allowable outlet pressure (water/air), Pa (torr)

    200 (1,5)

    270 (2,0)

    Pumping speed, l/s:

    N2

    1400

    2100

    3200

    Argon

    1350

    2000

    3100

    Compressionratio:

    N2

    108

    109

    He

    103

    105

    H2

    102

    103

    Ratedspeed,rpm

    33700

    27600

    Start-up time, min

    менее 9

    менее 16

    Maximum allowable Argon gas flow rate, sccm

    600

    1900

    Mountingposition

    Inanydesireddirection

    Max. temperature at an inlet flange, оС

    < 120

    Inlet flange

    ISO200B

    ISO250B

    ISO320B

    Outlet flange

    KF40

    Weight, kg

    60

    56

    94

    Recommended pumping speed of backing pump in case of gas purge, l/min (m3/h)

    >1500 (90)

    Turbomolecular pumps with rotor-bearing system

    Vacuum pumps

    Turbomolecular pumps with rotor-bearing system

    Edwards turbomolecular pumps (England)
    Hybrid bearing compound turbo pump Edwards EXT75DX

    Hybrid bearing compound turbo pump Edwards EXT75DX

    Model

    Inlet flange

    Pumping speed (N2), l/s

    Pumping speed (He), l/s

    Pumping speed (H2), l/s

    Compression ratio(N2)

    Compression ratio(He)

    Compression ratio(H2)

    Ultimate pressure, Pa (Torr)

    EXT75Dx

    NW40

    42

    49

    48

    >1*1011

    1*106

    5*104

    5×10-6 (3.7×10-8)

    ISO63-K

    61

    57

    53

    5×10-6 (3.7×10-8)

    ISO100-K

    66

    59

    54

    5×10-6 (3.7×10-8)

    DN63CF

    61

    57

    53

    5×10-7 (3.7×10-9)

    EXT556H

    ISO160-K

    540

    580

    500

    >1*1010

    1*108

    1*106

    2×10-7 (1.5×10-9)

    DN160CF

    1×10-8 (7.5×10-11)

    Hybrid bearing compound turbo pump Edwards nEXT300

    Hybrid bearing compound turbo pump Edwards nEXT300

    Model

    Inlet flange

    Pumping speed (N2), l/s

    Pumping speed (He), l/s

    Pumping speed (H2), l/s

    Compression ratio (N2)

    Compression ratio(He)

    Compression ratio(H2)

    Ultimate pressure, Pa (Torr)

    nEXT240

    ISO100-K

    240

    230

    165

    >1*1011

    3*105

    1*104

    6×10-6 (4.5×10-8)

    DN100CF

    5×10-8 (3.7×10-10)

    nEXT300

    ISO100-K

    300

    340

    280

    >1*1011

    1*106

    5*104

    6×10-6 (4.5×10-8)

    DN100CF

    5×10-8 (3.7×10-10)

    nEXT400

    ISO160-K

    400

    390

    325

    >1*1011

    1*108

    5*105

    1×10-6 (7.5×10-9)

    DN160CF

    1×10-8 (7.5×10-11)

    Turbomolecular pumps with magnetic upper and maintenance-free lower bearing

    Turbomolecular pumps with magnetic upper and maintenance-free lower bearing

    Hybrid-bearing TMP

    PT-150

    PT-300

    PT-500

    Flamges

    input

    JIS VG 100

    JIS VG 100

    JIS VG 150

    output

    NW 25

    NW 25

    NW 40

    Pumping speed, l/s

    N2

    190

    300

    550

    He

    160

    260

    500

    Max. Compressionratio

    N2

    108

    108

    108

    He

    104

    104

    105

    Ultimate pressure, Pa, (torr)

    10-8 (7,5*10-11)

    10-8 (7,5*10-11)

    10-8 (7,5*10-11)

    Max pressure, input/output, Pa, (torr)

    0,13/13 (9,8*10-4 / 9,8*10-2)

    0,13/13 (9,8*10-4 / 9,8*10-2)

    0,13/13 (9,8*10-4 / 9,8*10-2)

    Rated speed, rpm

    72,000

    54,000

    40,200

    Grease, V

    F, 10 ml

    F, 10 ml

    F, 10 ml

    Cooling method

    air/
    water

    air/
    water

    air/
    water

    Weight, kg

    6

    10

    16

    Compact hybrid bearing HiPace turbopumps in the pumping speed class of 10 to 800 l/s - HiPace 700

    Compact hybrid bearing HiPace turbopumps in the pumping speed class of 10 to 800 l/s - HiPace 700

    Model

    HiPace 10

    HiPace 60P

    HiPace 80

    HiPace 300

    HiPace 400

    HiPace 700

    HiPace 800

    - Flange (in), ISO-K, ISO-F, CF
    - Flange (out), ISO-KF
    - Venting connection


    DN25
    DN16


    DN63
    DN16
    G1/8"


    DN63
    DN16
    G1/8"


    DN100
    DN16
    G1/8"


    DN100
    DN25
    G1/8"


    DN160
    DN25
    G1/8"


    DN200
    DN25
    G1/8"

    Pumping speed, l/s
    - Nitrogen(N2)
    - Helium (Не)
    - Hydrogen(Н2)
    - Argon (Ar)


    10
    6
    3,7
    11,5


    64
    48
    28
    63


    67
    58
    48
    66


    260
    255
    220
    255


    355
    470
    445
    320


    685
    655
    555
    665


    790
    700
    580
    780

    Compression ratio:
    - Nitrogen (N2)
    - Helium (Не)
    - Hydrogen (Н2)
    - Argon (Ar)


    3*106
    3*103
    3*102
    2,5*107


    106
    3,5*102
    2*102
    2*106


    >1*1011
    1,3*107
    1,4*105
    >1*1011


    >1*1011
    1*108
    9*105
    >1*1011


    >1*1011
    3*107
    4*105
    >1*1011


    >1*1011
    3*107
    4*105
    >1*1011


    >1*1011
    3*107
    4*105
    >1*1011

    Ultimate pressure, Pa, (torr)

    < 10-3 (7,5*10-6)

    < 10-6 (7,5*10-9)

    < 10-6 (7,5*10-9)

    < 10-6 (7,5*10-9)

    < 10-6 (7,5*10-9)

    < 10-6 (7,5*10-9)

    < 10-6 (7,5*10-9)

    Max pressure, output, Pa, (torr)

    2500 (18,8)

    400 (3)

    2200 (16,5)

    2000 (15)

    1100 (8,3)

    1100 (8,3)

    1100 (8,3)

    Rated speed, rpm

    90 000

    90 000

    90 000

    60 000

    49 200

    49 200

    49 200

    Cooling type

    - standart
    - optional


    convection
    air


    convection
    air


    air
    air


    water
    air


    water
    air


    water
    air


    water
    air

    Power consumption

    24V/28,8 W

    24V/110W

    24V/110W

    24V/300W

    48V/420W

    48V/420W

    48V/420W

    Weight, kg

    1,8

    2,2

    2,4

    5,8 - 8,7

    11,6 - 17,5

    11,5 - 17,4

    12,8 - 19,1

    Compact hybrid bearing HiPace turbopumps in the pumping speed class of 1000 to 2000 l/s - HiPace 2300

    Compact hybrid bearing HiPace turbopumps in the pumping speed class of 1000 to 2000 l/s - HiPace 2300

    Model

    HiPace 1200

    HiPace 1500

    HiPace 1800

    HiPace 2300

    - Flange (in), ISO-K, ISO-F, CF
    - Flange (out), ISO-KF
    - Venting connection


    DN200
    DN40
    G1/8"


    DN250
    DN40
    G1/8"


    DN200
    DN40
    G1/8"


    DN250
    DN40
    G1/8"

    Pumping speed, l/s
    - Nitrogen (N2)
    - Helium (Не)
    - Hydrogen (Н2)
    - Argon (Ar)

    - Tetrafluoromethane (CF4)


    1 250
    1 300
    1 100
    1 200
    950


    1 450
    1 350
    1 150
    1 400
    1 100


    1 450
    1 650
    1 700
    1 370
    1 050


    1 900
    2 050
    1 850
    1 850
    1 850

    Compression ratio:
    - Nitrogen (N2)
    - Helium (Не)
    - Hydrogen (Н2)
    - Argon (Ar)

    - Tetrafluoromethane (CF4)


    >1*108
    2*105
    6*103
    >1*108
    >1*108


    >1*108
    2*105
    6*103
    >1*108
    >1*108


    >1*108
    3*105
    2*104
    >1*108
    >1*108


    >1*108
    3*105
    2*104
    >1*108
    >1*108

    Ultimate pressure, Pa, (torr)

    < 10-6 (7,5*10-9)

    < 10-6 (7,5*10-9)

    < 10-6 (7,5*10-9)

    < 10-6 (7,5*10-9)

    Max pressure, output, Pa, (torr)

    200 (1,5)

    200 (1,5)

    180 (1,4)

    180 (1,4)

    Rated speed, rpm

    37 800

    37 800

    31 500

    31 500

    Cooling type

    water

    water

    water

    water

    Power consumption

    220V/1,3kW

    220V/1,3 kW

    220V/1,3 kW

    220V/1,3 kW

    Weight, kg

    27 - 40

    29 - 41

    33 - 34

    34 - 47

    Pfeiffer MDP-5011 Turbo Drag High Vacuum Pumps

    Pfeiffer MDP-5011 Turbo Drag High Vacuum Pumps

    Technical data

    MDP 5011

    MDP 5011СР
    (Chemical Turbo Drag)

    Pumpingspeed, l/s

    N2

    7,5

    He

    4

    H2

    3

    Compression ratio

    N2

    1∙109

    1∙106

    2∙104

    250

    H2

    1∙103

    50

    Ultimate pressure measured to Pneurop standards with purge

    With any type of pump cooling

    1∙10-4

    Maximum continuous N2inlet pressure, Pа(torr)

    Natural convection

    10

    Forced air cooled

    1000

    Water cooled

    1000

    Maximum exhaust pressure, Pa (torr)

    With any type of pump cooling

    4000 (30)

    500 (3,8)

    Start-up, min

    <1

    Rotation speed, rpm

    27 000

    Exhaust flange

    DN16

    Controller

    ACT100

    Pump weight, kg

    convection

    2,3

    Forced air cooled

    3

    Water cooled

    2,5

    Controller weight, kg

    2

    Power supply, V / Hz

    220/50

    Power consumption, W

    75

    Turbomolecular pumps with bearings KYKY- FF-160/700E

    Turbomolecular pumps with bearings KYKY- FF-160/700E

    Technical data

    FF-100/110E

    FF-160/700E

    FF-160/700FE

    FF-200/1300E

    FF-200/1300FE

    FF-250/2000E

    Pumping speed, l/s

    150

    700

    700

    1300

    1300

    2000

    Compression ratio

    N2

    108

    109

    109

    109

    109

    109

    H2

    5х102

    6х106

    6х106

    6х103

    6х103

    6х103

    Ultimate pressure, no worse Pа (torr)

    ISO

    4.5х10-7 (3,4*10-9)

    6х10-7 (4,5*10-9)

    6х10-7 (4,5*10-9)

    6х10-6 (4,5*10-8)

    6х10-6 (4,5*10-8)

    6х10-6 (4,5*10-8)

    CF

    4.5х10-8 (3,4*10-10)

    6х10-8 (4,5*10-10)

    6х10-8 (4,5*10-10)

    6х10-7 (4,5*10-9)

    6х10-7 (4,5*10-9)

    -

    Inlet flange, mm.

    ISO100

    ISO160

    ISO160

    ISO200

    ISO200

    ISO250

    Outlet flange, mm.

    KF25

    KF40

    KF40

    KF40

    KF40

    KF50

    Orientation

    any

    Cooling method

    Water-air

    water

    Water-air

    water

    Water-air

    water

    Vacuum gauges

    Vacuum pumps

    Vacuum gauges

    Edwards vacuum gauges and controllers (England)
    Active series vacuum gauge (with digital output signal)
    Pirani vacuum gauge APG100-XM
    WRG Wide range gauge
    Pirani vacuum gauge APG100-XM
    WRG Wide range gauge

    Model

    Thermal

    Ionization

    Wide-range

    Membrane

    APG100-XM, APG-100-XLC

    APGX-H

    AIM

    AIGX

    WRG

    Barocel

    ASG2

    Measurementrange, mbar

    atm…10-3, atm…10-4

    atm…3·10-4

    10-2…10-9

    6,6·10-2… 6,6·10-10

    atm…10-9

    0…1, 0…10,

    0…100,

    0…1000

    1…1000,

    1…2000

    Accuracy, %

    ±15

    ±30

    ±10

    ±15p = аtm…10-3, ±30 p = 10-3…10-9

    ±0,15

    0,2

    Inlet flange

    NW16, NW25

    NW16, NW25, thread 1/8”

    NW25, CF40

    NW25, CF16, CF40

    NW25, CF40

    NW16, NW25, CF16, branch connection outer diameter.1/2”, резьба 1/8”

    NW16, thread 1/8”

    Power consumption, W

    1

    1,5

    2

    7

    2

    7

    0,1

    Cables include

    RJ45

    RJ45

    RJ45, D-SUB 9

    D-SUB 15,

    D-SUB 9

    4 pin connector

    Dimensions, mm

    83 × 25 × 41

    75 × 56 × 56

    125 × 79 × 79

    96 × 70 × 70

    106 × 65 × 65

    150 × 76 × 76

    116 × 45 × 25

    Weight, g

    100

    170

    810

    300

    800

    550

    150

    Controller vacuum gauge
    Edwards active inverted magnetron (AIM) gauges
    TIC instrument controller
    Edwards active inverted magnetron (AIM) gauges
    TIC instrument controller

    Model

    ADC

    ADC Enhanced

    TAG

    TIC InstrumentsController

    TIC Turbo&InstrumentsController

    1575

    Connection cable options

    1

    2

    1

    3, 6

    3

    1

    Indication

    LED-display (3 values + degree)

    LCD-display

    LED-display (5 values)

    Active gauge compatibility

    APG100, APGX-H, WRG

    APG100, APGX-H, WRG, AIM, ASG

    APG100, APGX-H, WRG, AIM, ASG

    APG100, APGX-H, ASG, AIM, WRG, AIGX, Barocel

    APG100, APGX-H, ASG, AIM, WRG, AIGX

    Barocel

    Relay

    -

    2

    -

    3, 6

    3

    4

    Interface

    -

    RS232, 2 3 analog output signals 0-10 В

    -

    RS232, RS485, 3 or 6 3 analog output signals0-10 В

    RS232, RS485, 3 3 analog output signals 0-10 В

    RS232, 1 analog output from the sensor

    Dimensions, mm

    159 × 96 × 43

    165 × 96 × 48

    125 × 79 × 79

    250 × 106 × 128

    120 × 91 × 44

    Weight, kg

    0,33

    0,3

    1,7

    1,8

    1

    Pfeiffer vacuum DigiLine vacuum gauges

    ActiveLine vacuum gauges

    ActiveLine vacuum gauge controllers

    Pfeiffer vacuum DigiLine vacuum gauges

    Vaculometers of the ModulLine series

    ActiveLine Vacuum Gauges

    Model

    APR

    CMR/CCR

    PCR

    TPR

    IKR

    PKR

    IMR

    PBR

    Sensor type

    Piezo

    Membrane

    Pirani / Capacitive

    Pirani

    Cold
    cathode

    Pirani / Cold
    cathode

    Hot cathode

    Pirani / Hot cathode

    Measurement range, mbar

    10-1 - 55 000

    10-5 - 1 100

    5*10-5 - 1500

    5*10-4 - 1000

    5*10-11 - 0,01

    5*10-9 - 1000

    2*10-6 - 1000

    5*10-10 - 1000

    ActiveLine Vacuum Gauge Controllers

    Model

    TPG 201

    TPG 261

    TPG 262

    TPG 265F

    Connectorssensor

    1 Pirani sensor
    Flange size DN 16 ISO-KF,
    battery operated

    1

    2

    6

    Interface cable

    -

    RS232C, 2 relay, analog output

    RS232C, 2 relays per channel, analog output

    RS232C or RS232C, RS422, RS422 isol., RS485 isol., 2 relays per channel, analog output

    Pfeiffer Vacuum DigiLine Vacuum Gauges

    Model

    CPT 200

    RPT 200

    PPT 200

    MPT 200

    HPT 200

    Sensor type

    Piezo

    Piezo/Pirani

    Pirani

    Pirani/ Cold
    cathode

    Pirani/Hotcathode(Iridium coated with Y2O3)

    Flanges

    DN16KF
    G 1/4”

    DN16KF
    DN16CF

    DN16KF
    DN16CF

    DN25KF
    DN40KF
    DN40CF

    DN40KF
    DN40CF

    Interface

     

     

     

     

     

    Measurement range, mbar

    1-2 000

    10-4-1 200

    10-4-1 000

    5*10-9-1 000

    5*10-10-1 000

    Accuracy

    1-1200 hPa: ± 0.1 % F.S.;>1200 hPa: ± 1 % F.S.

    1200 - 1000 hPa: 0,3 % Full Scale ; 10-2 · 10-3of reading ; ≤ 2 · 10-3hPa : ≤ factor 2 of reading

    1200 - 1000 hPa: 0,3 % Full Scale ; 10-2 · 10-3of reading ; ≤ 2 · 10-3hPa : ≤ factor 2 of reading

    1 · 10-8 - 2 · 10-3hPa: ± 25 %, 2 · 10-3 - 10 hPa: ± 10 %, 10-100 hPa: ± 30 %; 100-1000 hPa: ± 50 %

    10-5 - 1 hPa: ± 15 %

    Repeatability

     

    ± 1% Full scale 2 * 10-3.10 mbar of reading
    Full scale± 0.1% of reading 10 - 1200 mbar

    ± 2% of reading
    2 * 10-3 - 10 mbar

    ±7%
    10-8 – 10-2 mbar
    ±2%
    10-2 – 10mbar

    ±5% Full scale
    10-8 – 10-2 mbar of reading
    ±2% Full scale
    10-2 – 10 mbar of reading

    Supply, V

    24

    24

    24

    24

    24

    Materials in contact with media

    Ceramic, StainlessSteel, FPM

    Tungsten, stainless steel, silicon oxide, glass

    Tungsten, stainless steel, glass

    Tungsten, Stainless Steel, Nickel, Molybdenum, Glass

    Tungsten, stainless steel, nickel, glass, ceramics

    Pressuremax., atm

    4

    4

    4

    4

    4

    Bakeout temperature at the flange

    70

    125

    125

    180

    180

    Ambienttemperature, оС

    5-60

    5-60

    5-60

    5-60

    5-60

    Sensor cable length min., m

    100

    100

    100

    100

    100

    Supply: Power consumption, W

    1,5

    2,5

    2,5

    3,0

    7,5

    Weight, kg

    0,19

    0,195

    0,19

    0,555

    0,475

    Measuring cycle, ms

    10

    10

    10

    10

    10

    Miniature ionization vacuum gauge IGM-400
    CVM-201 convection vacuum gauge module
    Miniature ionization vacuum gauge IGM-400
    CVM-201 convection vacuum gauge module

    Vacuum sensors without indicators

    Model

    Thermal

    Ionization

    CVG-101

    IGM-400

    Measurementrange, mbar

    atm…10-4

    6,7·10-2…1,3·10-9

    Accuracy, %

    ±15

    ±10

    Inlet flange

    NW16, NW25, NW40, CF16, CF40, thread1/8”

    Power consumption, W

    1

    2

    Electrical connection

    5 pin connector

    D-SUB 9

    Dimensions, mm

    91 × 29 × 29

    82 × 71 × 68

    Weight, g

    85

    270

    Vacuum gauge module with a built-in controller

    Model

    Thermal

    Ionization

    Inverted Magnetron

    Wide range

    CVM-201

    CVM-211

    IGM-401

    CCM-501

    IGM-402

    Measurementrange, mbar

    atm…10-4

    6,7·10-2…1,3·10-9

    1,3·10-2…1,3·10-8

    atm…1,3·10-9

    Погрешность, %

    ±15

    ±10

    ±30

    ±15 p = atm…10-4,

    ±10 p = 10-4…1,3·10-9

    Inlet flange

    NW16, NW25, NW40, CF16, CF40, резьба 1/8”

    Power consumption, W

    2,1

    2

    3

    7,2

    16

    Indication

    LCD-display

    LED-display  (3-digit)

    LCD-display

    Relay

    2

    1

    1

    1

    3

    Interface

    RS232/RS485, analog output signal

    analogoutputsignal

    RS485, analog output signal 0-9 В

    RS485, analog output signal 0-8 В

    RS485, 3 configurable analog output signals

    Electrical connection

    D-SUB 9

    Dimensions, mm

    105 × 90 × 35

    105 × 48 × 48

    82 × 71 × 68

    97 × 88 × 71

    82 × 71 × 68

    Weight, g

    340

    136

    270

    770

    270

    Vacuum gauge controller

    Model

    VGC-301

    B-RAX 3000/3100

    FlexRax 4000

    Number of channel

    1

    3

    1

    Indication

    OLED-display

    3 independent LED displays + LCD control

    LCD-display

    Gauges

    CVG-101

    CVG-101, IGM-400

    Up to 4 IGM-400, up to 4 CVG-101, up to 2 membrane-capacitive gauges simultaneously

    Relay

    2

    3

    До 16

    Serialcommunications

    RS232/RS485serial communications, analog outputs

    analog outputs

    RS232/RS485serial communications, 8 analog outputs

    Dimensions, mm

    96 × 91 × 50

    183 × 208 × 78

    484 × 347 × 89

    Weight, g

    0,25

    1,62

    5,5

    Vacuum shut-off and structural devices

    Vacuum pumps

    Vacuum shut-off and structural devices

    Vacuum measurement, control and adjustment instruments

    VAT vacuum shut-off valves (Switzerland)VAT vacuum shut-off valves (Switzerland)

    VAT vacuum shut-off valves are high-quality vacuum valves and closures from a leading global manufacturer in this field. Vacuum valves and gates from VAT are made in various designs, with different actuators, including special models for complex technological processes. Valves are available - angular and straight through, gates - slide, pendulum, slotted, leakage and other elements of vacuum valves.

    Vacuum shut-off valves SMC (Japan)Vacuum shut-off valves SMC (Japan)

    Vacuum fittings SMC (Japan) are designed for using in various technological processes, such as coating and obtaining thin-film structures, growing single crystals, electron beam welding, mass spectrometers, vacuum furnaces and equipment for solving highly specialized problems. SMC fittings are represented by a range of standard straight and angle high vacuum valves with an aluminum alloy or stainless steel body with KF, CF or ISO flanges from 16 to 160 mm. (valves have manual, electromagnetic or pneumatic control), as well as vacuum locks.

    Vacuum shut-off valves CBVAC (China)Vacuum shut-off valves CBVAC (China)

    CBVAC shut-off and control gate valves are suitable for both high and ultra high vacuum applications, as well as for using in low vacuum. The valves have different types of seals: copper, fluoroelastomer or rubber, various material designs, types of actuators, as well as other design features, making CBVAC valves an excellent solution for many tasks.

    Vacuum structural fittings of leading Asian and European manufacturersVacuum structural fittings of leading Asian and European manufacturers

    A wide range of both standard and original (on request) vacuum components is available in various designs: clamps, centering rings, gaskets, adapters, claw flanges, semi-nipples, sight glasses, bellows and other components necessary to create absolutely any vacuum system.

    When creating installations in accordance with the Customer's wishes, the element base can be used – pumping tools, reference vacuum meters and shut-off valves-from various leading world manufacturers of vacuum equipment, such as Pfeiffer-Adixen, Edwards, Agilent, Anest Iwata, MKS, etc. Also, as part of the order for the production of the installation, tests are carried out for the purpose of approving the type of installation with the issuance of a certificate of primary verification.

    Documents

    Licenses and Approvals Equipment Patents Certificates and permissions Support information QMS Product overview
    License for designing nuclear installations
    License for manufacture of equipment for nuclear installations
    License for manufacture of equipment for nuclear installations
    Licence for designing and construction of nuclear installations
    License for the manufacture of equipment for radiation sources
    License touse ionizing radiation sources
    License for designing equipment for nuclear installations
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