Pump model

ISP-50

ISP-90

ISP-250C

ISP-500C

ISP-1000

Pumping Speeds 50 (Hz)/ 60 (Hz), L/min (m3/hr)

50 (Hz)
1.77 CFM
50.0 L/min
0.83 L/s
3.00 m3/hr

60 (Hz)
2.10 CFM
59.5 L/min
0.99 L/s
3.57 m3/hr

50 (Hz)
2.83 CFM
80.0 L/min
1.33 L/s
4.80 m3/hr

60 (Hz)
3.50 CFM
99.1 L/min
1.64 L/s
5.95 m3/hr

50 (Hz)
7.65 CFM
216 L/min
3.61 L/s
13.0 m3/hr

60 (Hz)
9.10 CFM
257 L/min
4.28 L/s
15.5 m3/hr

50 (Hz)
15.3 CFM
433 L/min
7.22 L/s
26.0 m3/hr

60 (Hz)
18.3 CFM
518 L/min
8.60 L/s
31.1 m3/hr

50 (Hz)
30.6 CFM
866 L/min
14.4 L/s
52.0 m3/hr

60 (Hz)
36.5 CFM
1033 L/min
17.2 L/s
62.0 m3/hr

Ultimate Pressure Pa (torr)

20 (0,15)

5 (3,8*10^-2)

1,6 (1,2*10^-2)

1 (7,5*10^-3)

1 (7,5*10^-3)

Motor Power HP (kW)

0.20 ( 0.10 )

0.20 ( 0.15 )

0.54 ( 0.40 )

0.82 ( 0.60 )

1.90 ( 1.40 )

Inlet Flange

KF25

KF25

KF25

KF40

KF40

Exhaust Flange

KF16

KF16

KF16

KF25

KF25

Method
Convection

Method
Convection

Method
Convection

Method
Convection

Method
Convection

12.5 x 6.10 x 8.94
(317 x 155 x 227 )

12.1 x 8.43 x 8.86
(308 x 214 x 225 )

15.7 x 9.92 x 13.2
(400 x 252 x 336 )

17.4 x 12.9 x 15.6
(443 x 328 x 397 )

19.8 x 15.4 x 16.6
(504 x 390 x 421 )

Weight Lbs (kg)

26.0 ( 12.0 )

30.9 ( 14.0 )

55.0 - 55.2 ( 23.0 - 25.0 )

84.0 - 97.1 ( 38.0 - 44.0 )

132 ( 60.0 )

Pump model

DVSL-100C

DVSL-500C

DVSL-501C

Pumping Speeds 50 (Hz), L/min (m3/hr)

100 (6)

430 (25,8)

430 (25,8)

Ultimate Pressure Pa (torr)

50 (0,38)

30 (0,23)

100 (0,75)

Motor Power HP (kW)

Inlet Flange

KF25

KF25

KF25

Exhaust Flange

KF16

KF25

KF25

Cooling Method(s)

Method
Convection

Method
Convection

Method
Convection

Dimensions in. (mm.)

358х210х215

491х317х280

491х317х280

Weight Lbs (kg)

15

36

36

Specification

SDL25K

SDL40K

Max. pumping speed (L/min)(m3/hr)

25,000 (1500)

40,000 (2400)

UltimatePressure Pa (torr)

0,8 (6*10^-3)

0,5 (3,75*10^-3)

Inlet Flange

NW100

NW160

Outlet Flange

NW50

Power in normal operation

11,2

15,0

Electric power supply

3 phase AC 200-220V 50/60 Hz

Dimensions L×W×H (mm)

1 000х520х1130

1 200х700х1354

Weight  (kg)

610

740

Specification

SDE90X*

SDE603X*

SDE1203X*

SDE2003

Max. pumping speed (L/min) (m3/hr)

1,300 (78)

10,000 (600)

20,000 (1200)

30 000 (1 800)

UltimatePressure Pa (torr)

1,3 (0,01)

0,5 (3,75*10^-3)

0,5 (3,75*10^-3)

0,5 (3,75*10^-3)

Inlet Flange

NW40

NW80

NW100

NW160

Outlet Flange

NW40

NW40

NW40

NW40

MaximumInletPressure (Pa)

Atmosphericpressure

Powerconsumption[kW]

1,3

1,5

2,0

4,0

Electric Power

3phaseAC200-220V50/60Hz

SupplyPower in normal operation (kW)*

2.8

3.1

3.6

40

Purge N2Gas Supply

0-60SLM

CoolingWaterSupply

4L/minandover

ElectricPowerCapacity (kVA)

6,5

10,5

13,0

17,6

Dimensions L×W×H (mm)

690*370*551

760*400*906

900*400*906

1 000*500*1 090

Weight (kg)

150

260

310

495

Technical data

GXS160

GXS250

GXS450

GXS750

Peal pumping speed (m3/hr)

2 667 (160)

4 167 (250)

7 500 (450)

12 333 (740)

Ultimate pressure (mbar)

1,2x10^-2

9x10^-3

1x10^-2

8x10^-3

Ultimate pressure without purge (mbar)

7x10^-3

4x10^-3

5x10^-3

3x10^-3

Cooling water Temperature⁰C

5-40

Maximum exhaust pressure, mbar

1400

Electric motor power, kW

7,5

11

22

Full Load Power (kW)

ultimate pressure

peak pumping load

3,8

5,0

 4

9

7,2

17,3

10

37

Vacuum couplings

Inlet

ISO63

ISO100

ISO100

Exhaust

NW40

NW50

IP degree

31

Technical data

GXS160

/1750

GXS250

/2600

GXS450

/2600

GXS450 /4200

GXS750 /2600

GXS750 /4200

Peal pumping speed (m3/hr)

20 000 (1200 )

31 667 (1900)

36 667 (2200)

50 433 (3026)

38 333 (2300)

57 500 (3450)

Ultimate pressure (mbar)

7x10^-4

5x10^-4

5,4x10^-4

Ultimate pressure without purge (mbar)

7x10^-4

5x10^-4

5x10^-4

5x10^-4

5x10^-4

7x10^-4

Cooling water Temperature⁰C

5-40

Maximum exhaust pressure, mbar

1400

Electric motor power, kW

7,5

11

22

Booster electric motor power, kW

5,5

7,5

Full Load Power (kW)

ultimate pressure

peak pumping load

5,1

7,4

5,3

9,7

8,8

20

9,4

21,1

11,1

40

11,5

40

Vacuum couplings

Inlet

ISO100

ISO160

Exhaust

NW40

NW50

IP degree

31

Модель

DUO 1.6
DUO 1.6 M

DUO 3
DUO 3 M

DUO 5 M
DUO 5 МС

DUO 6
DUO 6 M

DUO 10 M
DUO 10 МС

DUO 11
DUO 11 М

DUO 20 M
DUO 20 МС

DUO 35
DUO 35 М
DUO 35 MС

DUO 65
DUO 65 М
DUO 65 MС

DUO 125
DUO 125 М

DUO 255
DUO 255 М

Flange
- in, ISO-K(KF)
- out, ISO-K(KF)

DN16
DN16

DN16
DN16

DN16
DN16

DN16
DN16

DN25
DN25

DN16
DN16

DN25
DN25

DN40
DN40

DN40
DN40

DN63
DN63

DN100
DN100

Pumping speed, м3/ч

1,25

2,5

5

5

10

9

20

32

62

120

250

Ultimate pressure without gas ballast, mbar

3*10^-3

3*10^-3

4*10^-3

3*10^-3

3*10^-3

3*10^-3

2*10^-3

2*10^-3

2*10^-3

2*10^-3

3*10^-3

Ultimate pressure with gas ballast, mbar

3*10^-3

3*10^-3

7*10^-3

3*10^-3

6*10^-3

3*10^-3

4*10^-3

3*10^-3

3*10^-3

4*10^-3

4*10^-3

Operatingfluidamoun, l

0.4

0.4

0.75

0.5

1.0

0.6

1.1

3.2

4.2

14

25

Noise level, dBA

48

53

55 / 57

53

55 / 57

55

55 / 57

61

61

75

75

water vapor productivity, g / h

15

30

90

90

210

210

400

500

1000

1800

4350

Rotor speed, RPMin, at 50 Hz

1500

1500

1500

3000

1500

3000

1500

1500

1500

1500

1500

Power supply

1f 220-240 v

1f 220-240 v

3f 380-420 v/
1f 220-240 v

1f 230-240 v

3f 380-420 v/
1f 220-240 v

1f 208-240 v

3f 380-420 v/
1f 220-240 v

3f 380- 420 v

3f 380- 420 v

3f 380- 420 v

3f 380- 420 v

Power consumption kW

0.075

0.15

0.25 / 0.37

0.2

0.37 / 0.45

0.25

0.55 / 0.75

1.1

1.5

4.0

7.5

Weight, kg

9.6

11.3

19 / 25

16 / 17.5

24 / 30

17 / 19

33 / 44

68

75

225

360

Model

1005SD

1015SD

Inlet flange, ISO-KF
Exhaust flange, ISO-KF

DN25
DN25

DN25
DN25

Pumping speed, l/min (m³/h)

83.3 (5)

233 (14)

Ultimate pressure without gas ballast, Pa (torr)

5 (0.04)

5 (0.04)

Ultimate pressure with gas ballast, Pa (torr)

400 (3)

700 (5.3)

Oil capacity

0.8

1.0

Noise level, dBA

57

57

Water vapour pumping capacity g/h

120

330

typeofcooling

Air-cooled

Air-cooled

Power supply

3f 380-420 v/
1f 220-240 v

3f 380-420 v/
1f 220-240 f

Max nominal power rating 50/60HzkW

0.55 / 0.45

0.55 / 0.45

Weight, kg

21

24.5

Model

Penta 25

Penta 35

Connection flange, inlet, ISO-KF
Connection flange,outlet ISO-KF

DN25
DN25

DN25
DN25

Pumping speed, l/min (m³/h)

367 (22)

567 (34)

Ultimate pressure without gas ballast, Pa (torr)

0.3 (2.25*10^-3)

0.3 (2.25*10^-3)

Ultimate pressure with gas ballast, Pa (torr)

0.5 (3.75*10^-3)

0.5 (3.75*10^-3)

Oil capacity

1.8

1.5

Noise level, dBA

58

58

Water vapour pumping capacity g/h

300

370

Rotor speed, RPMin, at 50 Hz

1800

1800

typeofcooling

Air-cooled

Air-cooled

Power supply

1f 220-240 v

1f 220-240 v

Max nominal power rating 50/60Hz kW

0.41

0.41

Weight, kg

43

45

Model

Hena 25

Hena 40

Hena 60

Hena 100

Hena 200

Hena 300

Hena 400

Hena 630

Hena 1000

Hena 1600

Connection flange, inlet, ISO-KF
Connection flange,outlet ISO-KF

DN40
DN40

DN40
DN40

DN40
DN40

DN40
DN40

DN100
DN100

DN100
DN100

DN100
DN100

DN100
DN100

DN100
DN100

DN160
DN100

Pumping speed, l/min (m³/h)

417 (25)

667 (40)

1050 (63)

1667 (100)

3333 (200)

5000 (300)

6667 (400)

10500 (630)

16670 (1000)

26667 (1600)

Ultimate pressure without gas ballast, Pa (torr)

20 (0.15)

20 (0.15)

20 (0.15)

30 (0.23)

30 (0.23)

30 (0.23)

30 (0.23)

30 (0.23)

100 (0.75)

70 (0.53)

Ultimate pressure with gas ballast, Pa (torr)

150 (1.13)

30 (0.23)

150 (1.13)

150 (1.13)

70 (0.53)

70 (0.53)

70 (0.53)

70 (0.53)

120 (0.9)

120 (0.9)

Oil capacity

1

1

2

2

6,5

6,5

12

15

30

36

Noise level, dBA

60

63

64 / 65

65

72

74

77

77

82

82

Water vapour pumping capacity g/h

900

1200

1800

2800

4000

5000

9000

18000

19000

24000

Rotor speed, RPMin, at 50 Hz

1500

1500

1500

1500

1500

1500

1000

1000

1000

1000

Power supply

3f 380-420v/ 
1f 220-240 v

3f 380-420 v/ 
1 220-240 v

3f 380-420 v/ 
1f 220-240 v

3f 380- 420 v

3f 380- 420 v

3f 380- 420 v

3f 380- 420 v

3f 380- 420 v

3f 380- 420 v

3f 380- 420 v

Max nominal power rating 50/60Hz kW

0.9 / 1.1

1.4 / 1.8

2.0 / 1.8

2.5

5.5

7.5

13.5

15

22

30

Weight, kg

35 / 42

48 / 40

68 / 60

77

182

227

535

650

1200

1474

Model

BA 251

BA 501

Connection flange, inlet, ISO-F
Connection flange,outlet ISO-K

DN63
DN63

DN100
DN100

Pumping speed, l/min (m³/h)

4167 (250)

8333 (500)

Ultimate pressure without gas ballast, Pa (torr)

6 (0.05)

6 (0.05)

Ultimate pressure with gas ballast, Pa (torr)

100 (0.75)

100 (0.75)

Oil capacity

17

45

Noise level, dBA

63

65

Water vapour pumping capacity g/h

7000

14000

Rotor speed, RPMin, at 50 Hz

1500

1500

typeofcooling

Water cooled

Water cooled

Power supply

3f 380-420 v

3f 380-420 v

Max nominal power rating 50/60Hz kW

11

15

Weight, kg

570

1100

Model

Pumping speed, l/min (m³/h)

The number of stages pumping

Ultimate pressure

Max water vapour pumping rate, kg/h

without gas ballast, Pa (torr)

with gas ballast, Pa (torr)

E2M0.7

12.5  (0.75)

2

0.3 (2.3 х 10⁻³)

20 (0.15)

0.008

E2M1.5

26.7 (1.6)

2

0.25 (1.8 х 10⁻³)

2.5 (1.9 х 10⁻²)

0.016

RV3

55 (3.3)

2

0.2 (1.5 х 10⁻³)

3 (2.3 х 10⁻²)

0.22

RV5

85 (5.1)

2

0.2 (1.5 х 10⁻³)

3 (2.3 х 10⁻²)

0.22

RV8

142 (8.5)

2

0.2 (1.5 х 10⁻³)

3.0 (2.3 х 10⁻²)

0.22

RV12

200 (12.0)

2

0.2 (1.5 х 10⁻³)

3.0 (2.3 х 10⁻²)

0.29

E1M18

283 (17.0)

1

3.0 (2.2 х 10⁻²)

65 (4.8 х 10⁻¹)

0.65

E2M18

283 (17.0)

2

0.1 (7.5 х 10⁻⁴)

1.5 (1.1 х 10⁻²)

0.30

E2M28

458.3 (27.5)

2

0.1 (7.5 х 10⁻⁴)

1.5 (1.1 х 10⁻²)

0.70

E2M40

708.3 (42.5)

2

0.1 (7.7 х 10⁻⁴)

0.7 (5.4 х 10⁻³)

0.2

E2M80

1 333 (80)

2

0.1 (7.7 х 10⁻⁴)

0.7 (5.4 х 10⁻³)

0.3

E2M175

2 967 (178)

2

0.1 (7.7 х 10⁻⁴)

0.7 (5.4 х 10⁻³)

0.3

E2M275

4 867 (292 )

2

0.1 (7.7 х 10⁻⁴)

0.7 (5.4 х 10⁻³)

2.3

ES65

983.3 (59)

1

15 (0.11)

100 (0.8)

1.3

ES100

1 500 (90)

1

200 (1.5)

2.6

ES200

3 167 (190)

1

8 (0.06)

100 (0.8)

2.2

ES300

4 583 (275)

1

200 (1.5)

2.3

ES630

9 583 (575)

1

10 (0.08)

100 (0.8)

5.6

Parameter name

RVP-6

RVP12

RVP-24

RVP-36

RVP-48

RVP-60

RVP-90

Pumping speed, l/min (m³/h)

90 (5.4)

180 (10.8)

360 (21.6)

540 (32.4)

840 (50.4)

1 080 (64.8)

1 500 (90)

Ultimate pressure

Partial
Pressure, Pa (Torr)

4×10^-2 (3×10^-4)

4×10^-2 (3×10^-4)

4×10^-2 (3×10^-4)

4×10^-2 (3×10^-4)

4×10^-2 (3×10^-4)

4×10^-2 (3×10^-4)

4×10^-2 (3×10^-4)

Full
Pressure, Pa (Torr)

4×10^-1 (3×10^-3)

4×10^-1 (3×10^-3)

4×10^-1 (3×10^-3)

4×10^-1 (3×10^-3)

4×10^-1 (3×10^-3)

4×10^-1 (3×10^-3)

4×10^-1 (3×10^-3)

Oil capacity

1.3

1.1

1.4

1.8

3.8

5.5

6.5

Connection flange, inlet

KF25

KF25

KF25

KF40

KF40

KF40

KF40

Connection flange, outlet

KF25

KF25

KF25

KF25

KF40

KF40

KF40

Power rating, kW

0.4

0.4

0.75

0.75

1.5

2.2

2.5

Power supply, V

220-240

220-240

380-415

220-240

380-415

380-415

380-415

380-415

380-415

Rotor speed, RPMin

1 450

1 450

1 450

1 450

1 450

1 450

1 450

Weight, kg

23

25

37

39

64

83

88

Model

Connection flange, inlet

Pumping speed N₂ , l/s

Pumping speed H₂, l/s

Pumping speedAr, l/s

CompressionratioN₂

CompressionratioH₂

Max gas flowN₂, sccm

Max gas flowAr, sccm

Allowable backing pressure

STP-iX455

ISO100-K

300

300

-

>1*10⁸

>1*10⁴

^-

^-

6.5×10^-6 (5×10^-8)

DN100CF

1×10^-8 (7.5×10^-11)

ISO160-K

450

460

-

>1*10⁸

>1*10⁴

^-

^-

6.5×10^-6 (5×10^-8)

DN160CF

1×10^-8 (7.5×10^-11)

STP-iXR1606

ISO160-F

900

600

-

>1*10⁸

1*10³

4700

1800

1×10^-7 (7.5×10^-10)

VG150

ISO200-F/

ISO250-F

1600

1200

-

>1*10⁸

1*10³

4700

1800

1×10^-7 (7.5×10^-10)

VG200

STP-iXA2206C

ISO250-F

2200

-

1900

>1*10⁸

1*10⁴

3000

1400

1×10^-7 (7.5×10^-10)

DN250CF

STP-iXA3306C

ISO250-F

2650

-

2300

>1*10⁸

2*10³

4000

2100

1×10^-7 (7.5×10^-10)

DN250CF

ISO320-F

3200

-

2800

>1*10⁸

2*10³

4000

2100

1×10^-7 (7.5×10^-10)

DN320CF

STP-iXA4506C

ISO320-F

4000

2700

-

>1*10⁸

1*10³

4300

2600

1×10^-7 (7.5×10^-10)

Model

Connection flange, inlet

Pumping speed N₂, l/s

Pumping speed H₂, l/s

Pumping speed Ar, l/s

Compressionratio N₂

Compressionratio H₂

Max gas flow N₂, sccm

Max gas flowAr, sccm

STP301 / STP301C

ISO100-K

300

300

>1*10⁸

>2*10⁴

2500

-

6.5×10^-6 (5×10^-8)

DN100CF

1×10^-8 (7.5×10^-11)

STPH451 / STPH451C

ISO160-F

480

300

>1*10⁸

10³

2500

-

6.5×10^-6 (5×10^-8)

DN160CF

1×10^-8 (7.5×10^-11)

STP603 / STP603C

ISO160-F

650

550

>1*10⁸

>1*10⁵

130

-

1×10^-7 (7.5×10^-10)

DN160CF

1×10^-8 (7.5×10^-11)

STP1003 / STP1003C

ISO200-F

1000

800

>1*10⁸

>1*10⁵

130

-

1×10^-7 (7.5×10^-10)

DN200CF

1×10^-8 (7.5×10^-11)

STPA803C

ISO160-F

800

520

>1*10⁸

1*10³

1500

-

1×10^-7 (7.5×10^-10)

DN160CF

STPA1303C

ISO200-F

1300

800

>1*10⁸

1*10³

1500

-

1×10^-7 (7.5×10^-10)

DN200CF

STPA1603C

ISO200-F

1600

1200

>1*10⁸

>7*10³

2500

-

1×10^-7 (7.5×10^-10)

DN200CF

STPA2203C

ISO250-F

2200

1700

>1*10⁸

>2,5*10⁴

1500

-

1×10^-6 (7.5×10^-9)

DN250CF

STP-XA2703C

ISO250-F

2650

2050

>1*10⁸

>6*10³

2300

1900

1×10^-7 (7.5×10^-10)

DN250CF

STP-XA3203C

ISO320-F

3200

2300

>1*10⁸

>6*10³

2300

1900

1×10^-7 (7.5×10^-10)

DN320CF

STP-XA4503C

ISO320-F

4000

2500

>1*10⁸

>6*10³

2800

2150

1×10^-7 (7.5×10^-10)

Model

HiPace 300 M

HiPace 700 M

HiPace 800 M

- Flange (in), ISO-K, ISO-F, CF
- Flange (out), ISO-KF
- Venting connection

DN100
DN16
G1/8"

DN160
DN25
G1/8"

DN200
DN25
G1/8"

Pumping speed, l/s
- Nitrogen(N₂)
- Helium(Не)
- Hydrogen(Н₂)
- Argon(Ar)

255
215
170
250

685
600
480
660

790
625
500
775

Compression ratio
- Nitrogen (N₂)
- Helium(Не)
- Hydrogen(Н₂)
- Argon(Ar)

>1*10¹¹
>1*10⁸
5*10⁵
>1*10¹¹

>1*10¹¹
>1*10⁷
2*10⁵
>1*10¹¹

>1*10¹¹
>1*10⁷
2*10⁵
>1*10¹¹

Ultimatepressure, Pa, torr

< 1*10^-5 (7.5*10^-8)

< 1*10^-5 (7.5*10^-8)

< 1*10^-5 (7.5*10^-8)

Maximum output working pressure, Pa (Torr)

2000 (15)

800 (6)

800 (6)

Rotation speed RPM

60 000

49 200

49 200

Cooling type

Water cooled

Water cooled

Water cooled

Power consumption

48V/300W

48V/300W

48V/300W

Weight, kg

13.1 - 17.2

15.7 - 20.8

17.1 - 21.5

Technicaldata

ATH
500M

ATH
1300M

ATH
1300MT*

ATH
1603M

ATH
1600MT*

ATH
2303M

ATH
2300MT*

ATH
2800M

ATH
2800MТ*

ATH
3200M

ATH
3200MТ*

RotationspeedRPM

50 000

39 000

39 000

31 000

31 000

31 000

31 000

25 000

25 000

25 000

25 000

Flange (in)

DN 
100

DN 
160

DN 
160

DN 
200

DN 
160

DN 
200

DN
200

DN 
250

DN
200

DN
250

DN 
200

DN
250

DN 
200

DN 
200

DN 
250

DN 
250

DN 
320

DN 
320

Pumping speedsfor,l/s

N₂

340

500

920

1250

920

1250

1200

1220

1230

1270

1250

1850

1250

1850

2050

2050

2600

2600

Ar

270

500

920

1250

920

1250

1100

1150

1130

1180

1200

1750

1200

1750

2000

2000

2400

2400

He

270

340

810

850

810

850

960

960

960

960

1500

1600

1500

1600

2150

2150

2400

2400

H₂

170

190

490

550

490

550

550

550

580

580

1200

1200

1200

1200

1750

1750

1800

1800

Compression ratio

N₂

2*10⁷

10⁷

10⁷

6*10⁷

6*10⁷

>10⁸

>10⁸

>10⁸

>10⁸

>10⁸

>10⁸

Ar

8*10⁶

10⁷

10⁷

6*10⁷

6*10⁷

>10⁸

>10⁸

>10⁸

>10⁸

>10⁸

>10⁸

He

10⁴

10³

10³

8*10³

8*10³

>3*10⁴

>3*10⁴

>3*10⁴

>3*10⁴

>3*10⁴

>3*10⁴

H₂

2*10²

10²

10²

3*10²

3*10²

>10³

>2*10³

>2*10³

>2*10³

>2*10³

>2*10³

Ultimatepressure, Pa, torr

<10^-6 (7,5 *10^-10)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

<6*10^-7 (4,5 *10^-9)

Maximum input working pressure, Pa (Torr)

130 (1)

50 (0,4)

50 (0,4)

40 (0,3)

2 (1,5 *10^-2)

30 (0,2)

14 (0,1)

26 (0,2)

1 (7,5 *10^-3)

26 (0,2)

1  (7,5 *10^-3)

Maximum output working pressure, Pa (Torr)

270 (2)

150 (1,1)

150 (1,1)

150 (1,1)

100 (0,8)

200 (1,5)

150 (1,1)

150 (1,1)

100 (0,8)

150 (1,1)

100 (0,8)

Max. pumped flow, cm³/
min.

2500

3000

3000

4000

1000

4000

1000

5000

1000

5000

1000

Cooling method

Water

Mountingposition

Inanydesireddirection

Flange (out)

DN40

Run up time, min

<2,5

<5

<5

6

6

8

8

10

10

10

10

Turbine weight, kg

17

34

34

34

34

60

60

85

85

85

85

Controller

Integrated

ACT1300M

ACT1300M

Mag- power/
OBC

ACT1300M/
OBC

Mag- power/
OBC

Mag- power/
OBC

Mag- power

Mag- power

Mag- power

Mag- power

Controller weight, kg

8

8

8

8

8,7

8,7

8,7

8,7

8,7

8,7

Controller power supply

100 to 240V - 50 / 60Hz - single phase

Technical data

ATP 2300M

Connection flange

DN200, ISO F, CF

DN250, ISO F, CF

Pumpingspeed, l/c

N₂

1250

1750

Ar

1200

1650

He

1700

1800

H₂

1700

1700

Compressionratio

N₂

10⁸

Ar

10⁸

He

10⁵

H₂

7*10³

RPM

31 000

Pressure min, Pa, torr

10^-7 (7,5*10^-10)

Maximum input working pressure, Pa (Torr)

5 (0,04)

Maximum output working pressure, Pa (Torr)

150 (1,13)

Dimensions, mm

Height

290

Diameter

315

Weight, kg

52

Model

TMP-203

TMP-303

TMP-403

TMP-803

TMP-1003

TMP-2003

TMP-3203

Cooling method

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

water/air-cooled

Ultimatepressure, Pa, (torr)

1,3*10^-8 (10^-10)

1,3*10^-8 (10^-10)

1,3*10^-8 (10^-10)

1,3*10^-9 (10^-11)

1,3*10^-9 (10^-11)

1,3*10^-9 (10^-11)

1,3*10^-9 (10^-11)

Maximum allowable inlet pressure(water/air), Pa (torr)

200/1,3 (1,5/0,01)

200/1,3 (1,5/0,01)

200/1,3 (1,5/0,01)

400/1,3 (3/0,01)

400/1,3 (3/0,01)

67/0,4 (0,5/ 0,003)

40/0,4 (0,3/ 0,003)

Maximum allowable outlet pressure (water/air), Pa (torr)

400/40 (3/0,3)

400/40 (3/0,3)

400/40 (3/0,3)

667/40 (5/0,3)

667/40 (5/0,3)

267/40 (2/0,3)

267/40 (2/0,3)

Pumping speed, l/s:

N₂

190

320

420

800

1080

2000

3200

He

140

340

360

800

930

1800

3000

H₂

120

320

340

700

790

1600

2400

Compressionratio:

N₂

1*10⁹

1*10⁹

1*10⁹

1*10⁹

>1*10⁹

1*10⁹

1*10⁹

He

6*10⁴

8*10⁴

8*10⁴

8*10⁴

8*10⁴

7*10⁵

3*10⁵

H₂

4*10³

1*10⁴

1*10⁴

4*10³

4*10³

1,4*10⁴

1*10⁴

Start-up time, min

5 minutes or less

9 minutes or less

13 minutes or less

Mountingposition

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Bake-out temperature at an inlet flange, ^оС

<120

<120

<120

<120

<120

<120

<120

InletflangeISO, ConFlat

DU100

DU100

DU160

DU160

DU200

DU250

DU320

Recommended pumping speed of backing pump in case of gas purge, l/min (m³/h)

>200 (>12)

>200 (>12)

>200 (>12)

>500 (>30)

>500 (>30)

>500 (>30)

>1500 (>90)

Weight, kg

9

14

14

31

32

55

70

Model

TMP-1103MP

TMP-1103LMP

TMP-1103LMPC

TMP-W2403LMC

FT-3500D

H3153LMC

Cooling method

воздушное

водяное

водяное

водяное

водяное

водяное

Ultimatepressure, Pa, (torr)

1,3*10^-9 (10^-11)

1,3*10^-9 (10^-11)

1,3*10^-8 (10^-10)

1,3*10^-7 (10^-9)

10^-7 (7,5*10^-10)

1.3*10^-5 (10^-7)

Maximum allowable inlet pressure (water/air), Pa (torr)

1,3 (0,01)

6,7 (0,05)

66,7 (0,5)

40 (0,3)

По Ar: 2,1 (1,6*10^-2)

1,33 (10^-2)

Maximum allowable outlet pressure (water/air), Pa (torr)

267 (2)

800 (6)

800 (6)

267 (2)

По Ar: 1330 (10)

270 (2)

Pumping speed, l/s:

N₂

1080

1080

1080

2100

2300

3270

2950

Argon

1040

1040

1040

2000

-

-

-

H₂

800

800

800

1770

-

-

3000

He

-

-

-

2240

-

-

3000

Compressionratio:

N₂

>10⁹

>10⁹

>10⁹

1*10¹¹

5*10⁹

>10⁷

Argon

10⁷

10⁷

10⁷

По He: 4*10⁶

-

-

H₂

10⁶

10⁶

10⁶

1*10⁵

1*10⁶

10⁵ (for H₂ и He)

Start-up time, min

5 minutes or less

5 minutes or less

5 minutes or less

12 minutes or less

18 minutes or less

18 minutes or less

Mountingposition

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Inanydesireddirection

Bake-out temperature at an inlet flange, ^оС

<120

<120

<120

<120

40

<120

Inlet flangeISO, ConFlat

DU200

DU 200

DU 200

DU 250

JIS VG250

JIS VG350

DU 320

Weight, kg

32

32

32

72

88

80

Model

TMP-V1704LM

TMP-V2304LM

TMP-V3304LM (F)

TMP-V3304LMC (F)

Cooling method

Water

Ultimatepressure, Pa, (torr)

10^-7 (10^-9)

10^-6 (10^-8)

10^-7 (10^-9)

10^-7 (10^-9)

Maximum allowable inlet pressure (water/air), Pa (torr)

4,5 (0,03)

7 (0,05)

Maximum allowable outlet pressure (water/air), Pa (torr)

200 (1,5)

270 (2,0)

Pumping speed, l/s:

N₂

1400

2100

3200

Argon

1350

2000

3100

Compressionratio:

N₂

10⁸

10⁹

He

10³

10⁵

H₂

10²

10³

Ratedspeed,rpm

33700

27600

Start-up time, min

менее 9

менее 16

Maximum allowable Argon gas flow rate, sccm

600

1900

Mountingposition

Inanydesireddirection

Max. temperature at an inlet flange, ^оС

< 120

Inlet flange

ISO200B

ISO250B

ISO320B

Outlet flange

KF40

Weight, kg

60

56

94

Recommended pumping speed of backing pump in case of gas purge, l/min (m³/h)

>1500 (90)

Model

Inlet flange

Pumping speed (N₂), l/s

Pumping speed (He), l/s

Pumping speed (H₂), l/s

Compression ratio(N₂)

Compression ratio(He)

Compression ratio(H₂)

Ultimate pressure, Pa (Torr)

EXT75Dx

NW40

42

49

48

>1*10¹¹

1*10⁶

5*10⁴

5×10^-6 (3.7×10^-8)

ISO63-K

61

57

53

5×10^-6 (3.7×10^-8)

ISO100-K

66

59

54

5×10^-6 (3.7×10^-8)

DN63CF

61

57

53

5×10^-7 (3.7×10^-9)

EXT556H

ISO160-K

540

580

500

>1*10¹⁰

1*10⁸

1*10⁶

2×10^-7 (1.5×10^-9)

DN160CF

1×10^-8 (7.5×10^-11)

Model

Inlet flange

Pumping speed (N₂), l/s

Pumping speed (He), l/s

Pumping speed (H₂), l/s

Compression ratio (N₂)

Compression ratio(He)

Compression ratio(H₂)

Ultimate pressure, Pa (Torr)

nEXT240

ISO100-K

240

230

165

>1*10¹¹

3*10⁵

1*10⁴

6×10^-6 (4.5×10^-8)

DN100CF

5×10^-8 (3.7×10^-10)

nEXT300

ISO100-K

300

340

280

>1*10¹¹

1*10⁶

5*10⁴

6×10^-6 (4.5×10^-8)

DN100CF

5×10^-8 (3.7×10^-10)

nEXT400

ISO160-K

400

390

325

>1*10¹¹

1*10⁸

5*10⁵

1×10^-6 (7.5×10^-9)

DN160CF

1×10^-8 (7.5×10^-11)

Hybrid-bearing TMP

PT-150

PT-300

PT-500

Flamges

input

JIS VG 100

JIS VG 100

JIS VG 150

output

NW 25

NW 25

NW 40

Pumping speed, l/s

N₂

190

300

550

He

160

260

500

Max. Compressionratio

N₂

10⁸

10⁸

10⁸

He

10⁴

10⁴

10⁵

Ultimate pressure, Pa, (torr)

10^-8 (7,5*10^-11)

10^-8 (7,5*10^-11)

10^-8 (7,5*10^-11)

Max pressure, input/output, Pa, (torr)

0,13/13 (9,8*10^-4 / 9,8*10^-2)

0,13/13 (9,8*10^-4 / 9,8*10^-2)

0,13/13 (9,8*10^-4 / 9,8*10^-2)

Rated speed, rpm

72,000

54,000

40,200

Grease, V

F, 10 ml

F, 10 ml

F, 10 ml

Cooling method

air/
water

air/
water

air/
water

Weight, kg

6

10

16

Model

HiPace 10

HiPace 60P

HiPace 80

HiPace 300

HiPace 400

HiPace 700

HiPace 800

- Flange (in), ISO-K, ISO-F, CF
- Flange (out), ISO-KF
- Venting connection

DN25
DN16

DN63
DN16
G1/8"

DN63
DN16
G1/8"

DN100
DN16
G1/8"

DN100
DN25
G1/8"

DN160
DN25
G1/8"

DN200
DN25
G1/8"

Pumping speed, l/s
- Nitrogen(N₂)
- Helium (Не)
- Hydrogen(Н₂)
- Argon (Ar)

10
6
3,7
11,5

64
48
28
63

67
58
48
66

260
255
220
255

355
470
445
320

685
655
555
665

790
700
580
780

Compression ratio:
- Nitrogen (N₂)
- Helium (Не)
- Hydrogen (Н₂)
- Argon (Ar)

3*10⁶
3*10³
3*10²
2,5*10⁷

10⁶
3,5*10²
2*10²
2*10⁶

>1*10¹¹
1,3*10⁷
1,4*10⁵
>1*10¹¹

>1*10¹¹
1*10⁸
9*10⁵
>1*10¹¹

>1*10¹¹
3*10⁷
4*10⁵
>1*10¹¹

>1*10¹¹
3*10⁷
4*10⁵
>1*10¹¹

>1*10¹¹
3*10⁷
4*10⁵
>1*10¹¹

Ultimate pressure, Pa, (torr)

< 10^-3 (7,5*10^-6)

< 10^-6 (7,5*10^-9)

< 10^-6 (7,5*10^-9)

< 10^-6 (7,5*10^-9)

< 10^-6 (7,5*10^-9)

< 10^-6 (7,5*10^-9)

< 10^-6 (7,5*10^-9)

Max pressure, output, Pa, (torr)

2500 (18,8)

400 (3)

2200 (16,5)

2000 (15)

1100 (8,3)

1100 (8,3)

1100 (8,3)

Rated speed, rpm

90 000

90 000

90 000

60 000

49 200

49 200

49 200

Cooling type

- standart
- optional

convection
air

convection
air

air
air

water
air

water
air

water
air

water
air

Power consumption

24V/28,8 W

24V/110W

24V/110W

24V/300W

48V/420W

48V/420W

48V/420W

Weight, kg

1,8

2,2

2,4

5,8 - 8,7

11,6 - 17,5

11,5 - 17,4

12,8 - 19,1

Model

HiPace 1200

HiPace 1500

HiPace 1800

HiPace 2300

- Flange (in), ISO-K, ISO-F, CF
- Flange (out), ISO-KF
- Venting connection

DN200
DN40
G1/8"

DN250
DN40
G1/8"

DN200
DN40
G1/8"

DN250
DN40
G1/8"

Pumping speed, l/s
- Nitrogen (N₂)
- Helium (Не)
- Hydrogen (Н₂)
- Argon (Ar)

- Tetrafluoromethane (CF4)

1 250
1 300
1 100
1 200
950

1 450
1 350
1 150
1 400
1 100

1 450
1 650
1 700
1 370
1 050

1 900
2 050
1 850
1 850
1 850

Compression ratio:
- Nitrogen (N₂)
- Helium (Не)
- Hydrogen (Н₂)
- Argon (Ar)

- Tetrafluoromethane (CF4)

>1*10⁸
2*10⁵
6*10³
>1*10⁸
>1*10⁸

>1*10⁸
2*10⁵
6*10³
>1*10⁸
>1*10⁸

>1*10⁸
3*10⁵
2*10⁴
>1*10⁸
>1*10⁸

>1*10⁸
3*10⁵
2*10⁴
>1*10⁸
>1*10⁸

Ultimate pressure, Pa, (torr)

< 10^-6 (7,5*10^-9)

< 10^-6 (7,5*10^-9)

< 10^-6 (7,5*10^-9)

< 10^-6 (7,5*10^-9)

Max pressure, output, Pa, (torr)

200 (1,5)

200 (1,5)

180 (1,4)

180 (1,4)

Rated speed, rpm

37 800

37 800

31 500

31 500

Cooling type

water

water

water

water

Power consumption

220V/1,3kW

220V/1,3 kW

220V/1,3 kW

220V/1,3 kW

Weight, kg

27 - 40

29 - 41

33 - 34

34 - 47

Technical data

MDP 5011

MDP 5011СР
(Chemical Turbo Drag)

Pumpingspeed, l/s

N₂

7,5

He

4

H₂

3

Compression ratio

N₂

1∙10⁹

1∙10⁶

Hе

2∙10⁴

250

H₂

1∙10³

50

Ultimate pressure measured to Pneurop standards with purge

With any type of pump cooling

1∙10^-4

Maximum continuous N₂inlet pressure, Pа(torr)

Natural convection

10

Forced air cooled

1000

Water cooled

1000

Maximum exhaust pressure, Pa (torr)

With any type of pump cooling

4000 (30)

500 (3,8)

Start-up, min

<1

Rotation speed, rpm

27 000

Exhaust flange

DN16

Controller

ACT100

Pump weight, kg

convection

2,3

Forced air cooled

3

Water cooled

2,5

Controller weight, kg

2

Power supply, V / Hz

220/50

Power consumption, W

75

Technical data

FF-100/110E

FF-160/700E

FF-160/700FE

FF-200/1300E

FF-200/1300FE

FF-250/2000E

Pumping speed, l/s

150

700

700

1300

1300

2000

Compression ratio

N₂

10⁸

10⁹

10⁹

10⁹

10⁹

10⁹

H₂

5х10²

6х10⁶

6х10⁶

6х10³

6х10³

6х10³

Ultimate pressure, no worse Pа (torr)

ISO

4.5х10^-7 (3,4*10^-9)

6х10^-7 (4,5*10^-9)

6х10^-7 (4,5*10^-9)

6х10^-6 (4,5*10^-8)

6х10^-6 (4,5*10^-8)

6х10^-6 (4,5*10^-8)

CF

4.5х10^-8 (3,4*10^-10)

6х10^-8 (4,5*10^-10)

6х10^-8 (4,5*10^-10)

6х10^-7 (4,5*10^-9)

6х10^-7 (4,5*10^-9)

-

Inlet flange, mm.

ISO100

ISO160

ISO160

ISO200

ISO200

ISO250

Outlet flange, mm.

KF25

KF40

KF40

KF40

KF40

KF50

Orientation

any

Cooling method

Water-air

water

Water-air

water

Water-air

water

Model

Thermal

Ionization

Wide-range

Membrane

APG100-XM, APG-100-XLC

APGX-H

AIM

AIGX

WRG

Barocel

ASG2

Measurementrange, mbar

atm…10^-3, atm…10^-4

atm…3·10^-4

10^-2…10^-9

6,6·10^-2… 6,6·10^-10

atm…10^-9

0…1, 0…10,

0…100,

0…1000

1…1000,

1…2000

Accuracy, %

±15

±30

±10

±15p = аtm…10^-3, ±30 p = 10^-3…10^-9

±0,15

0,2

Inlet flange

NW16, NW25

NW16, NW25, thread 1/8”

NW25, CF40

NW25, CF16, CF40

NW25, CF40

NW16, NW25, CF16, branch connection outer diameter.1/2”, резьба 1/8”

NW16, thread 1/8”

Power consumption, W

1

1,5

2

7

2

7

0,1

Cables include

RJ45

RJ45

RJ45, D-SUB 9

D-SUB 15,

D-SUB 9

4 pin connector

Dimensions, mm

83 × 25 × 41

75 × 56 × 56

125 × 79 × 79

96 × 70 × 70

106 × 65 × 65

150 × 76 × 76

116 × 45 × 25

Weight, g

100

170

810

300

800

550

150

Model

ADC

ADC Enhanced

TAG

TIC InstrumentsController

TIC Turbo&InstrumentsController

1575

Connection cable options

1

2

1

3, 6

3

1

Indication

LED-display (3 values + degree)

LCD-display

LED-display (5 values)

Active gauge compatibility

APG100, APGX-H, WRG

APG100, APGX-H, WRG, AIM, ASG

APG100, APGX-H, WRG, AIM, ASG

APG100, APGX-H, ASG, AIM, WRG, AIGX, Barocel

APG100, APGX-H, ASG, AIM, WRG, AIGX

Barocel

Relay

-

2

-

3, 6

3

4

Interface

-

RS232, 2 3 analog output signals 0-10 В

-

RS232, RS485, 3 or 6 3 analog output signals0-10 В

RS232, RS485, 3 3 analog output signals 0-10 В

RS232, 1 analog output from the sensor

Dimensions, mm

159 × 96 × 43

165 × 96 × 48

125 × 79 × 79

250 × 106 × 128

120 × 91 × 44

Weight, kg

0,33

0,3

1,7

1,8

1

ActiveLine Vacuum Gauges

Model

APR

CMR/CCR

PCR

TPR

IKR

PKR

IMR

PBR

Sensor type

Piezo

Membrane

Pirani / Capacitive

Pirani

Cold
cathode

Pirani / Cold
cathode

Hot cathode

Pirani / Hot cathode

Measurement range, mbar

10^-1 - 55 000

10^-5 - 1 100

5*10^-5 - 1500

5*10^-4 - 1000

5*10^-11 - 0,01

5*10^-9 - 1000

2*10^-6 - 1000

5*10^-10 - 1000

ActiveLine Vacuum Gauge Controllers

Model

TPG 201

TPG 261

TPG 262

TPG 265F

Connectorssensor

1 Pirani sensor
Flange size DN 16 ISO-KF,
battery operated

1

2

6

Interface cable

-

RS232C, 2 relay, analog output

RS232C, 2 relays per channel, analog output

RS232C or RS232C, RS422, RS422 isol., RS485 isol., 2 relays per channel, analog output

Pfeiffer Vacuum DigiLine Vacuum Gauges

Model

CPT 200

RPT 200

PPT 200

MPT 200

HPT 200

Sensor type

Piezo

Piezo/Pirani

Pirani

Pirani/ Cold
cathode

Pirani/Hotcathode(Iridium coated with Y2O3)

Flanges

DN16KF
G 1/4”

DN16KF
DN16CF

DN16KF
DN16CF

DN25KF
DN40KF
DN40CF

DN40KF
DN40CF

Interface

Measurement range, mbar

1-2 000

10-4-1 200

10-4-1 000

5*10^-9-1 000

5*10^-10-1 000

Accuracy

1-1200 hPa: ± 0.1 % F.S.;>1200 hPa: ± 1 % F.S.

1200 - 1000 hPa: 0,3 % Full Scale ; 10-2 · 10^-3of reading ; ≤ 2 · 10^-3hPa : ≤ factor 2 of reading

1200 - 1000 hPa: 0,3 % Full Scale ; 10^-2 · 10^-3of reading ; ≤ 2 · 10^-3hPa : ≤ factor 2 of reading

1 · 10-8 ^{- 2} · 10^-3hPa: ± 25 %, 2 · 10^-3 - 10 hPa: ± 10 %, 10-100 hPa: ± 30 %; 100-1000 hPa: ± 50 %

10-5 - 1 hPa: ± 15 %

Repeatability

± 1% Full scale 2 * 10-3.10 mbar of reading
Full scale± 0.1% of reading 10 - 1200 mbar

± 2% of reading
2 * 10-3 - 10 mbar

±7%
10^-8 – 10^-2 mbar
±2%
10-2 ^{– 10}mbar

±5% Full scale
10-8 – 10-2 mbar of reading
±2% Full scale
10-2 – 10 mbar of reading

Supply, V

24

24

24

24

24

Materials in contact with media

Ceramic, StainlessSteel, FPM

Tungsten, stainless steel, silicon oxide, glass

Tungsten, stainless steel, glass

Tungsten, Stainless Steel, Nickel, Molybdenum, Glass

Tungsten, stainless steel, nickel, glass, ceramics

Pressuremax., atm

4

4

4

4

4

Bakeout temperature at the flange

70

125

125

180

180

Ambienttemperature, ^оС

5-60

5-60

5-60

5-60

5-60

Sensor cable length min., m

100

100

100

100

100

Supply: Power consumption, W

1,5

2,5

2,5

3,0

7,5

Weight, kg

0,19

0,195

0,19

0,555

0,475

Measuring cycle, ms

10

10

10

10

10

Model

Thermal

Ionization

CVG-101

IGM-400

Measurementrange, mbar

atm…10^-4

6,7·10^-2…1,3·10^-9

Accuracy, %

±15

±10

Inlet flange

NW16, NW25, NW40, CF16, CF40, thread1/8”

Power consumption, W

1

2

Electrical connection

5 pin connector

D-SUB 9

Dimensions, mm

91 × 29 × 29

82 × 71 × 68

Weight, g

85

270

Model

Thermal

Ionization

Inverted Magnetron

Wide range

CVM-201

CVM-211

IGM-401

CCM-501

IGM-402

Measurementrange, mbar

atm…10^-4

6,7·10^-2…1,3·10^-9

1,3·10^-2…1,3·10^-8

atm…1,3·10^-9

Погрешность, %

±15

±10

±30

±15 p = atm…10^-4,

±10 p = 10^-4…1,3·10^-9

Inlet flange

NW16, NW25, NW40, CF16, CF40, резьба 1/8”

Power consumption, W

2,1

2

3

7,2

16

Indication

LCD-display

LED-display  (3-digit)

LCD-display

Relay

2

1

1

1

3

Interface

RS232/RS485, analog output signal

analogoutputsignal

RS485, analog output signal 0-9 В

RS485, analog output signal 0-8 В

RS485, 3 configurable analog output signals

Electrical connection

D-SUB 9

Dimensions, mm

105 × 90 × 35

105 × 48 × 48

82 × 71 × 68

97 × 88 × 71

82 × 71 × 68

Weight, g

340

136

270

770

270

Model

VGC-301

B-RAX 3000/3100

FlexRax 4000

Number of channel

1

3

1

Indication

OLED-display

3 independent LED displays + LCD control

LCD-display

Gauges

CVG-101

CVG-101, IGM-400

Up to 4 IGM-400, up to 4 CVG-101, up to 2 membrane-capacitive gauges simultaneously

Relay

2

3

До 16

Serialcommunications

RS232/RS485serial communications, analog outputs

analog outputs

RS232/RS485serial communications, 8 analog outputs

Dimensions, mm

96 × 91 × 50

183 × 208 × 78

484 × 347 × 89

Weight, g

0,25

1,62

5,5

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