Thermal diffusion equipment

Thermal diffusion and thermo compression equipment

Thermal diffusion equipment

Functionality:The system is designed for automatic group thermal thermal precision processing of silicon wafers with a diameter of 100 mm in the manufacture of semiconductor electronics products.
Thermal diffusion equipment

SD.OMThermal diffusion is a physicochemical process that changes the surface structure of a workpiece under conditions of thermal stabilization and a controlled atmosphere.

At present, NPO GKMP LLC is the only domestic manufacturer of SDOM type thermal diffusion systems designed for processing semiconductor wafers with a diameter of up to 100 mm. It is possible to manufacture plants for processing plates with a diameter of up to 150 mm; in the future, plants for thermal diffusion of plates with a diameter of 200 mm and 300 mm are being developed.

Depending on customer requirements, in thermal diffusion systems it is possible to realize oxidation processes (including pyrogenic) and diffusion using various oxidizing agents and diffusants (nitrogen, chlorine, arsenic, phosphorus, boron, etc.)

The heating elements used in installations like SD.OM have a unique design and are wound from wire of special grades of high-temperature alloys (Eurofechral, kanthal, kanthal A1). Winding is carried out in a hot state according to a specially developed technological cycle, which significantly reduces the residual deformation of the resulting heater and extends its service life.

Features of installations like SD.OM:

  • number of heating chambers: 2 or 3;
  • maximum process temperature: 1250 ° C;
  • length of the working thermal zone: 600 mm;
  • temperature field distribution error: ± 1 ° С;
  • temperature reproduction accuracy: ± 1 ° С;
  • heating element material: Kanthal or Eurofechral;
  • loading and unloading: manual or using built-in loaders;
  • modern automated process control system;
  • independent operation of each reactor;
  • energy-efficient power supply system for heaters;
  • accurate system for controlling the flow of oxidizing agents and diffusants.

Parameter name

Value

Number of chambers in the installation:

1, 2, 3 или 4

Form of the chamber

cylindrical

Dimensions of the working area of the chamber:
- diameter, mm:
- length, mm:

100, 150 (200 and 300 under development)

600* (according to customer request)

Operating temperature range in the heating chamber, оС:

100...1250

Heating type

resistive

Permissible mass with parts, kg

1...15

Range of heating / cooling speeds, ° C / min:

1…20

Processes:

diffusion, oxidation (including pyrogenic)

Number of inputs for working gases:

2...8

Available operations with working gases:

mixing, moisturizing

Minimum percentage of each gas when mixed:

5%

Range of automatic adjustment of the flow rate of each gas, l / min:

20...600

Possibility to install additional liquid diffuser bubblers:

yes

Possibility to install a loading and unloading system with the possibility of shaking:

yes

The uniformity of temperature in the working space without loading the electric furnace with automatic control of maintaining the temperature in the steady state, ° C, is not worse:

±1±0,0005t

Stability of maintaining the operating temperature in the working area when controlling heating in automatic mode, ° C, no worse:

±1±0,0005t


Thermal compression equipment

Thermal diffusion and thermo compression equipment

Thermal compression equipment

Thermal compression equipment

UTDSThermocompression is a physical process that combines the heating of a product or a group of products with the application of an adjustable force that generates a specific physical process.

Thermocompression welding is the process of welding parts from dissimilar materials, carried out with heating under pressure. The essence of the process is as follows: when exposed to pressure and temperature on the treated surface, the material of one part settles and begins to flow along the second part. As a result of this, the contact site is heated, it is cleaned of the oxide film and other extraneous formations, the surfaces come together as close as possible and a tight weld is obtained. The advantages of the described process include low sensitivity to changes in operating parameters, stability of the entire welding process and process control by controlling pressure and temperature.

Thermocompression technology is used in powder metallurgy to create products from refractory materials, dissimilar metals and composites. Varying the process parameters, it is possible to obtain parts of complex shape with an identical composition, but different physicochemical properties.

Hot punching and burning processes are used in critical areas of production of complex products in the case where other production technologies do not allow to obtain the product of the proper quality.

Thermocompression units manufactured by NPO GKMP are manufactured according to the customer’s technological map or strictly in accordance with the statement of work. Owing to the in-house production of electrothermal equipment, as well as extensive experience in creating pressurized chambers, pressurized inlets, controlled hydraulic cylinders, pneumatic cylinders and compression oil stations, it is possible to manufacture thermocompression units with various values of operating pressures - from several kilograms to tens of tons, and temperatures - up to 2200 ° WITH.

Thermocompression units manufactured by NPO GKMP are fully automated. The control system clearly fulfills feedback on the temperature of the welded joint and the applied force. The composition of the atmosphere or the degree of vacuum inside the chamber is continuously maintained at a given level. The control system fully fulfills all known emergency and emergency situations, and in the event of a non-critical failure it will help to successfully and accidentally complete the process.

Parameter name

Value

Number of chambers in the installation:

1 or 2

Form of the chamber

cylindrical or rectangular

Dimensions of the working area of the chamber:
- diameter, mm:
- length, mm:

100...400

120...600

Operating temperature range in the heating chamber, оС:

100...1850

Heating type

resestive

Permissible mass with parts, kg

10...150

Range of heating / cooling speeds, ° C / min:

1…20

transmitted force,kH

0,1...630 or more

Number of inputs for working gases:

1...4

Available operations with working gases:

mixing, moisturizing

Minimum percentage of each gas when mixed:

5%

Range of automatic adjustment of the flow rate of each gas, l / min:

20...600

Possibility to install additional liquid diffuser bubblers:

yes

Possibilityto install a loading and unloading system with the possibility of shaking:

yes

The uniformity of temperature in the working space without loading the electric furnace with automatic control of maintaining the temperature in the steady state, ° C, is not worse:

±5±0,0005t

Stability of maintaining the operating temperature in the working area when controlling heating in automatic mode, ° C, no worse:

±5±0,0003t


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